Nanoimprint fabrication of slot waveguides

Marianne Hiltunen, Esa Heinonen, Jussi Hiltunen, Jarkko Puustinen, Jyrki Lappalainen, Pentti Karioja

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)


    A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.
    Original languageEnglish
    Article number6476619
    Number of pages9
    JournalIEEE Photonics Journal
    Issue number2
    Publication statusPublished - 2013
    MoE publication typeA1 Journal article-refereed


    • fabrication and characterization
    • subwavelength structures
    • waveguides


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