Nanoimprint fabrication of slot waveguides

Marianne Hiltunen; Esa Heinonen; Jussi Hiltunen; Jarkko Puustinen; Jyrki Lappalainen; Pentti Karioja

doi:10.1109/JPHOT.2013.2251876

Nanoimprint fabrication of slot waveguides

Marianne Hiltunen, Esa Heinonen, Jussi Hiltunen, Jarkko Puustinen, Jyrki Lappalainen, Pentti Karioja

University of Oulu

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Abstract

A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.

Original language	English
Article number	6476619
Number of pages	9
Journal	IEEE Photonics Journal
Volume	5
Issue number	2
DOIs	https://doi.org/10.1109/JPHOT.2013.2251876
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

Keywords

fabrication and characterization
subwavelength structures
waveguides

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10.1109/JPHOT.2013.2251876

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title = "Nanoimprint fabrication of slot waveguides",

abstract = "A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.",

keywords = "fabrication and characterization, subwavelength structures, waveguides",

author = "Marianne Hiltunen and Esa Heinonen and Jussi Hiltunen and Jarkko Puustinen and Jyrki Lappalainen and Pentti Karioja",

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T1 - Nanoimprint fabrication of slot waveguides

AU - Hiltunen, Marianne

AU - Heinonen, Esa

AU - Hiltunen, Jussi

AU - Puustinen, Jarkko

AU - Lappalainen, Jyrki

AU - Karioja, Pentti

PY - 2013

Y1 - 2013

N2 - A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.

AB - A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.

KW - fabrication and characterization

KW - subwavelength structures

KW - waveguides

U2 - 10.1109/JPHOT.2013.2251876

DO - 10.1109/JPHOT.2013.2251876

M3 - Article

SN - 1943-0655

VL - 5

JO - IEEE Photonics Journal

JF - IEEE Photonics Journal

IS - 2

M1 - 6476619

ER -

Nanoimprint fabrication of slot waveguides

Abstract

Keywords

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