Nanoimprint fabrication of slot waveguides

Marianne Hiltunen, E. Heinonen, Jussi Hiltunen, J. Puustinen, J. Lappalainen, Pentti Karioja

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Abstract

A nanoimprint mold for optical waveguide applications was fabricated by combining photolithography and focused ion beam (FIB) milling. The feasibility of the proposed method was demonstrated by imprinting 15-mm-long Y-branch waveguides, which had nanoscale slots embedded in one arm. Structural analysis of the FIB milled region showed surface roughness values below 2.5 nm. Characterization of the fabricated waveguides proved that 44% of the optical power was transmitted through the slot-embedded waveguide arm. Operation of slot waveguide was demonstrated at a wavelength of 1305 nm using Young interferometer devices.
Original languageEnglish
Article number6476619
Number of pages9
JournalIEEE Photonics Journal
Volume5
Issue number2
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Fingerprint

slots
Waveguides
waveguides
Fabrication
fabrication
Focused ion beams
ion beams
Optical waveguides
Photolithography
photolithography
structural analysis
Structural analysis
optical waveguides
Interferometers
surface roughness
interferometers
Surface roughness
Wavelength
wavelengths

Keywords

  • fabrication and characterization
  • subwavelength structures
  • waveguides

Cite this

Hiltunen, Marianne ; Heinonen, E. ; Hiltunen, Jussi ; Puustinen, J. ; Lappalainen, J. ; Karioja, Pentti. / Nanoimprint fabrication of slot waveguides. In: IEEE Photonics Journal. 2013 ; Vol. 5, No. 2.
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Nanoimprint fabrication of slot waveguides. / Hiltunen, Marianne; Heinonen, E.; Hiltunen, Jussi; Puustinen, J.; Lappalainen, J.; Karioja, Pentti.

In: IEEE Photonics Journal, Vol. 5, No. 2, 6476619, 2013.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Nanoimprint fabrication of slot waveguides

AU - Hiltunen, Marianne

AU - Heinonen, E.

AU - Hiltunen, Jussi

AU - Puustinen, J.

AU - Lappalainen, J.

AU - Karioja, Pentti

PY - 2013

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KW - fabrication and characterization

KW - subwavelength structures

KW - waveguides

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