Abstract
| Original language | English |
|---|---|
| Pages (from-to) | 23-31 |
| Number of pages | 9 |
| Journal | Materials Science and Engineering C: Materials for Biological Applications |
| Volume | 23 |
| Issue number | 1-2 |
| DOIs | |
| Publication status | Published - 2003 |
| MoE publication type | A1 Journal article-refereed |
Fingerprint
Keywords
- nanofabrication
- nanoimprint lithography
- polymer moulding
Cite this
}
Nanoimprint lithography : An alternative nanofabrication approach. / Sotomayor Torres, C.M. (Corresponding Author); Zankovych, S.; Seekamp, J.; Kam, A. P.; Cedeño, C. Clavijo; Hoffmann, T.; Ahopelto, Jouni; Reuther, F.; Pfeiffer, K.; Bleidiessel, G.; Gruetzner, G.; Maximov, M. V.; Heidari, B.
In: Materials Science and Engineering C: Materials for Biological Applications, Vol. 23, No. 1-2, 2003, p. 23-31.Research output: Contribution to journal › Article › Scientific › peer-review
TY - JOUR
T1 - Nanoimprint lithography
T2 - An alternative nanofabrication approach
AU - Sotomayor Torres, C.M.
AU - Zankovych, S.
AU - Seekamp, J.
AU - Kam, A. P.
AU - Cedeño, C. Clavijo
AU - Hoffmann, T.
AU - Ahopelto, Jouni
AU - Reuther, F.
AU - Pfeiffer, K.
AU - Bleidiessel, G.
AU - Gruetzner, G.
AU - Maximov, M. V.
AU - Heidari, B.
PY - 2003
Y1 - 2003
N2 - A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.
AB - A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.
KW - nanofabrication
KW - nanoimprint lithography
KW - polymer moulding
U2 - 10.1016/S0928-4931(02)00221-7
DO - 10.1016/S0928-4931(02)00221-7
M3 - Article
VL - 23
SP - 23
EP - 31
JO - Materials Science and Engineering C: Materials for Biological Applications
JF - Materials Science and Engineering C: Materials for Biological Applications
SN - 0928-4931
IS - 1-2
ER -