Nanoimprint lithography

An alternative nanofabrication approach

C.M. Sotomayor Torres (Corresponding Author), S. Zankovych, J. Seekamp, A. P. Kam, C. Clavijo Cedeño, T. Hoffmann, Jouni Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M. V. Maximov, B. Heidari

Research output: Contribution to journalArticleScientificpeer-review

154 Citations (Scopus)

Abstract

A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.
Original languageEnglish
Pages (from-to)23-31
Number of pages9
JournalMaterials Science and Engineering C: Materials for Biological Applications
Volume23
Issue number1-2
DOIs
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Fingerprint

Nanoimprint lithography
nanofabrication
Nanotechnology
lithography
Polymers
polymers

Keywords

  • nanofabrication
  • nanoimprint lithography
  • polymer moulding

Cite this

Sotomayor Torres, C. M., Zankovych, S., Seekamp, J., Kam, A. P., Cedeño, C. C., Hoffmann, T., ... Heidari, B. (2003). Nanoimprint lithography: An alternative nanofabrication approach. Materials Science and Engineering C: Materials for Biological Applications, 23(1-2), 23-31. https://doi.org/10.1016/S0928-4931(02)00221-7
Sotomayor Torres, C.M. ; Zankovych, S. ; Seekamp, J. ; Kam, A. P. ; Cedeño, C. Clavijo ; Hoffmann, T. ; Ahopelto, Jouni ; Reuther, F. ; Pfeiffer, K. ; Bleidiessel, G. ; Gruetzner, G. ; Maximov, M. V. ; Heidari, B. / Nanoimprint lithography : An alternative nanofabrication approach. In: Materials Science and Engineering C: Materials for Biological Applications. 2003 ; Vol. 23, No. 1-2. pp. 23-31.
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abstract = "A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.",
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Sotomayor Torres, CM, Zankovych, S, Seekamp, J, Kam, AP, Cedeño, CC, Hoffmann, T, Ahopelto, J, Reuther, F, Pfeiffer, K, Bleidiessel, G, Gruetzner, G, Maximov, MV & Heidari, B 2003, 'Nanoimprint lithography: An alternative nanofabrication approach', Materials Science and Engineering C: Materials for Biological Applications, vol. 23, no. 1-2, pp. 23-31. https://doi.org/10.1016/S0928-4931(02)00221-7

Nanoimprint lithography : An alternative nanofabrication approach. / Sotomayor Torres, C.M. (Corresponding Author); Zankovych, S.; Seekamp, J.; Kam, A. P.; Cedeño, C. Clavijo; Hoffmann, T.; Ahopelto, Jouni; Reuther, F.; Pfeiffer, K.; Bleidiessel, G.; Gruetzner, G.; Maximov, M. V.; Heidari, B.

In: Materials Science and Engineering C: Materials for Biological Applications, Vol. 23, No. 1-2, 2003, p. 23-31.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Nanoimprint lithography

T2 - An alternative nanofabrication approach

AU - Sotomayor Torres, C.M.

AU - Zankovych, S.

AU - Seekamp, J.

AU - Kam, A. P.

AU - Cedeño, C. Clavijo

AU - Hoffmann, T.

AU - Ahopelto, Jouni

AU - Reuther, F.

AU - Pfeiffer, K.

AU - Bleidiessel, G.

AU - Gruetzner, G.

AU - Maximov, M. V.

AU - Heidari, B.

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AB - A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.

KW - nanofabrication

KW - nanoimprint lithography

KW - polymer moulding

U2 - 10.1016/S0928-4931(02)00221-7

DO - 10.1016/S0928-4931(02)00221-7

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