Nanoimprint lithography: An alternative nanofabrication approach

C.M. Sotomayor Torres; S. Zankovych; J. Seekamp; A. P. Kam; C. Clavijo Cedeño; T. Hoffmann; Jouni Ahopelto; F. Reuther; K. Pfeiffer; G. Bleidiessel; G. Gruetzner; M. V. Maximov; B. Heidari

doi:10.1016/S0928-4931(02)00221-7

Nanoimprint lithography: An alternative nanofabrication approach

C.M. Sotomayor Torres (Corresponding Author), S. Zankovych, J. Seekamp, A. P. Kam, C. Clavijo Cedeño, T. Hoffmann, Jouni Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M. V. Maximov, B. Heidari

Research output: Contribution to journal › Article › Scientific › peer-review

156 Citations (Scopus)

Abstract

A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.

Original language	English
Pages (from-to)	23-31
Number of pages	9
Journal	Materials Science and Engineering C: Materials for Biological Applications
Volume	23
Issue number	1-2
DOIs	https://doi.org/10.1016/S0928-4931(02)00221-7
Publication status	Published - 2003
MoE publication type	A1 Journal article-refereed

Keywords

nanofabrication
nanoimprint lithography
polymer moulding

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Sotomayor Torres, C. M., Zankovych, S., Seekamp, J., Kam, A. P., Cedeño, C. C., Hoffmann, T., Ahopelto, J., Reuther, F., Pfeiffer, K., Bleidiessel, G., Gruetzner, G., Maximov, M. V., & Heidari, B. (2003). Nanoimprint lithography: An alternative nanofabrication approach. Materials Science and Engineering C: Materials for Biological Applications, 23(1-2), 23-31. https://doi.org/10.1016/S0928-4931(02)00221-7

Sotomayor Torres, C.M. ; Zankovych, S. ; Seekamp, J. ; Kam, A. P. ; Cedeño, C. Clavijo ; Hoffmann, T. ; Ahopelto, Jouni ; Reuther, F. ; Pfeiffer, K. ; Bleidiessel, G. ; Gruetzner, G. ; Maximov, M. V. ; Heidari, B. / Nanoimprint lithography : An alternative nanofabrication approach. In: Materials Science and Engineering C: Materials for Biological Applications. 2003 ; Vol. 23, No. 1-2. pp. 23-31.

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title = "Nanoimprint lithography: An alternative nanofabrication approach",

abstract = "A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.",

keywords = "nanofabrication, nanoimprint lithography, polymer moulding",

author = "{Sotomayor Torres}, C.M. and S. Zankovych and J. Seekamp and Kam, {A. P.} and Cede{\~n}o, {C. Clavijo} and T. Hoffmann and Jouni Ahopelto and F. Reuther and K. Pfeiffer and G. Bleidiessel and G. Gruetzner and Maximov, {M. V.} and B. Heidari",

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doi = "10.1016/S0928-4931(02)00221-7",

language = "English",

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pages = "23--31",

journal = "Materials Science and Engineering C: Materials for Biological Applications",

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Sotomayor Torres, CM, Zankovych, S, Seekamp, J, Kam, AP, Cedeño, CC, Hoffmann, T, Ahopelto, J, Reuther, F, Pfeiffer, K, Bleidiessel, G, Gruetzner, G, Maximov, MV & Heidari, B 2003, 'Nanoimprint lithography: An alternative nanofabrication approach', Materials Science and Engineering C: Materials for Biological Applications, vol. 23, no. 1-2, pp. 23-31. https://doi.org/10.1016/S0928-4931(02)00221-7

Nanoimprint lithography : An alternative nanofabrication approach. / Sotomayor Torres, C.M. (Corresponding Author); Zankovych, S.; Seekamp, J.; Kam, A. P.; Cedeño, C. Clavijo; Hoffmann, T.; Ahopelto, Jouni; Reuther, F.; Pfeiffer, K.; Bleidiessel, G.; Gruetzner, G.; Maximov, M. V.; Heidari, B.

In: Materials Science and Engineering C: Materials for Biological Applications, Vol. 23, No. 1-2, 2003, p. 23-31.

Research output: Contribution to journal › Article › Scientific › peer-review

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AU - Sotomayor Torres, C.M.

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AU - Seekamp, J.

AU - Kam, A. P.

AU - Cedeño, C. Clavijo

AU - Hoffmann, T.

AU - Ahopelto, Jouni

AU - Reuther, F.

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AU - Bleidiessel, G.

AU - Gruetzner, G.

AU - Maximov, M. V.

AU - Heidari, B.

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KW - nanofabrication

KW - nanoimprint lithography

KW - polymer moulding

U2 - 10.1016/S0928-4931(02)00221-7

DO - 10.1016/S0928-4931(02)00221-7

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JO - Materials Science and Engineering C: Materials for Biological Applications

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