Nanoimprint lithography: An alternative nanofabrication approach

C.M. Sotomayor Torres (Corresponding Author), S. Zankovych, J. Seekamp, A. P. Kam, C. Clavijo Cedeño, T. Hoffmann, Jouni Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M. V. Maximov, B. Heidari

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    Abstract

    A status report of nanoimprint lithography is given in the context of alternative nanofabrication methods. Since the ultimate resolution of nanoimprint appears to be determined by the stamp, this is discussed in detail, particularly the recent developments on polymer stamps. The scope of the technique is illustrated with applications in passive optical structures and organic devices. Throughout the report, critical dimensions are discussed, as well as other challenges facing nanoimprint lithography.
    Original languageEnglish
    Pages (from-to)23-31
    Number of pages9
    JournalMaterials Science and Engineering C: Materials for Biological Applications
    Volume23
    Issue number1-2
    DOIs
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

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    Keywords

    • nanofabrication
    • nanoimprint lithography
    • polymer moulding

    Cite this

    Sotomayor Torres, C. M., Zankovych, S., Seekamp, J., Kam, A. P., Cedeño, C. C., Hoffmann, T., Ahopelto, J., Reuther, F., Pfeiffer, K., Bleidiessel, G., Gruetzner, G., Maximov, M. V., & Heidari, B. (2003). Nanoimprint lithography: An alternative nanofabrication approach. Materials Science and Engineering C: Materials for Biological Applications, 23(1-2), 23-31. https://doi.org/10.1016/S0928-4931(02)00221-7