Nanoimprint lithography for organic electronics

C. Clavijo Cedeño (Corresponding Author), J. Seekamp, A.P. Kam, T. Hoffmann, S. Zankovych, C.M. Sotomayor Torres, C. Menozzi, M. Cavallini, M. Murgia, G. Ruani, F. Biscarini, M. Behl, R. Zentel, Jouni Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    60 Citations (Scopus)

    Abstract

    Thin films made of organic semiconductors (-sexithiophene, PDAS and PBAS) have been printed and the impact on morphology studied by optical, atomic force and electron microscopy. Surfaces in contact with the stamp during printing undergo a change towards smoother and more ordered material at the macromolecular scale. Interdigitated nanoelectrodes to be used as source and drain in TFTs have been made and printed down to 100 nm. PDAS and PBAS can be printed at room temperature and preserve their printed feature provided they are cross-linked afterwards.
    Original languageEnglish
    Pages (from-to)25-31
    JournalMicroelectronic Engineering
    Volume61-62
    DOIs
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • nanoimprint lithography
    • oligothiophenes
    • triaraylamines

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  • Cite this

    Cedeño, C. C., Seekamp, J., Kam, A. P., Hoffmann, T., Zankovych, S., Sotomayor Torres, C. M., Menozzi, C., Cavallini, M., Murgia, M., Ruani, G., Biscarini, F., Behl, M., Zentel, R., & Ahopelto, J. (2002). Nanoimprint lithography for organic electronics. Microelectronic Engineering, 61-62, 25-31. https://doi.org/10.1016/S0167-9317(02)00505-1