Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting

S. Zankovych, J. Seekamp, C. Cedeno, C. Sotomayor Torres, Jouni Ahopelto, K. Pfeiffer, D. Reuther, A. Wieck

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2001
MoE publication type	Not Eligible
Event	8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001 - Wurzburg, Germany Duration: 4 Jul 2001 → 6 Jul 2001

Workshop	8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001
Country/Territory	Germany
City	Wurzburg
Period	4/07/01 → 6/07/01

Cite this

@conference{c6b323cdde9a4f8fa03b53bdf22fe609,

title = "Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting",

author = "S. Zankovych and J. Seekamp and C. Cedeno and {Sotomayor Torres}, C. and Jouni Ahopelto and K. Pfeiffer and D. Reuther and A. Wieck",

year = "2001",

language = "English",

note = "8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001 ; Conference date: 04-07-2001 Through 06-07-2001",

}

TY - CONF

T1 - Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting

AU - Zankovych, S.

AU - Seekamp, J.

AU - Cedeno, C.

AU - Sotomayor Torres, C.

AU - Ahopelto, Jouni

AU - Pfeiffer, K.

AU - Reuther, D.

AU - Wieck, A.

PY - 2001

Y1 - 2001

M3 - Conference article

T2 - 8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001

Y2 - 4 July 2001 through 6 July 2001

ER -