|Publication status||Published - 2001|
|MoE publication type||Not Eligible|
|Event||8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001 - Wurzburg, Germany|
Duration: 4 Jul 2001 → 6 Jul 2001
|Workshop||8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001|
|Period||4/07/01 → 6/07/01|
Zankovych, S., Seekamp, J., Cedeno, C., Sotomayor Torres, C., Ahopelto, J., Pfeiffer, K., Reuther, D., & Wieck, A. (2001). Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting. Paper presented at 8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001, Wurzburg, Germany.