Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2001
MoE publication type	Not Eligible
Event	8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001 - Wurzburg, Germany Duration: 4 Jul 2001 → 6 Jul 2001

Workshop	8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001
Country/Territory	Germany
City	Wurzburg
Period	4/07/01 → 6/07/01

Cite this

@conference{c6b323cdde9a4f8fa03b53bdf22fe609,

title = "Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting",

author = "S. Zankovych and J. Seekamp and C. Cedeno and \{Sotomayor Torres\}, C. and Jouni Ahopelto and K. Pfeiffer and D. Reuther and A. Wieck",

year = "2001",

language = "English",

note = "8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001 ; Conference date: 04-07-2001 Through 06-07-2001",

}

TY - CONF

T1 - Nanoimprinting of a UV- and electron beam sensitive polymer and optical investigation of possible damage by nanoimprinting

AU - Zankovych, S.

AU - Seekamp, J.

AU - Cedeno, C.

AU - Sotomayor Torres, C.

AU - Ahopelto, Jouni

AU - Pfeiffer, K.

AU - Reuther, D.

AU - Wieck, A.

PY - 2001

Y1 - 2001

M3 - Conference article

T2 - 8th MEL-ARI/NID Workshop, Wurzburg, 4 - 6 July 2001

Y2 - 4 July 2001 through 6 July 2001

ER -