Nanoimprinting polyimide and polymer multilayers

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer
    Original languageEnglish
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
    Pages73-76
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011 -
    Duration: 1 Jan 2011 → …

    Conference

    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011
    Period1/01/11 → …

    Fingerprint

    polyimides
    lithography
    polymers
    silicon
    temperature

    Keywords

    • Nanoimprinting lithography
    • polyimide

    Cite this

    Kolari, K., Haatainen, T., Ylinen, S., & Aalto, T. (2011). Nanoimprinting polyimide and polymer multilayers. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 73-76)
    Kolari, Kai ; Haatainen, Tomi ; Ylinen, Sami ; Aalto, Timo. / Nanoimprinting polyimide and polymer multilayers. Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. pp. 73-76
    @inproceedings{a50ce0e0e4114f0696dffd832b888832,
    title = "Nanoimprinting polyimide and polymer multilayers",
    abstract = "This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer",
    keywords = "Nanoimprinting lithography, polyimide",
    author = "Kai Kolari and Tomi Haatainen and Sami Ylinen and Timo Aalto",
    year = "2011",
    language = "English",
    isbn = "978-82-7860-224-9",
    pages = "73--76",
    booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

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    Kolari, K, Haatainen, T, Ylinen, S & Aalto, T 2011, Nanoimprinting polyimide and polymer multilayers. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. pp. 73-76, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011, 1/01/11.

    Nanoimprinting polyimide and polymer multilayers. / Kolari, Kai; Haatainen, Tomi; Ylinen, Sami; Aalto, Timo.

    Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. p. 73-76.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    AU - Aalto, Timo

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    N2 - This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

    AB - This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

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    KW - polyimide

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    SN - 978-82-7860-224-9

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    EP - 76

    BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

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    Kolari K, Haatainen T, Ylinen S, Aalto T. Nanoimprinting polyimide and polymer multilayers. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. p. 73-76