Nanoimprinting polyimide and polymer multilayers

Kai Kolari; Tomi Haatainen; Sami Ylinen; Timo Aalto

Nanoimprinting polyimide and polymer multilayers

Kai Kolari, Tomi Haatainen, Sami Ylinen, Timo Aalto

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

Original language	English
Title of host publication	Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Pages	73-76
Publication status	Published - 2011
MoE publication type	A4 Article in a conference publication
Event	22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011 - Duration: 1 Jan 2011 → …

Conference

Conference	22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011
Period	1/01/11 → …

Keywords

Nanoimprinting lithography
polyimide

Cite this

@inproceedings{a50ce0e0e4114f0696dffd832b888832,

title = "Nanoimprinting polyimide and polymer multilayers",

abstract = "This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer",

keywords = "Nanoimprinting lithography, polyimide",

author = "Kai Kolari and Tomi Haatainen and Sami Ylinen and Timo Aalto",

year = "2011",

language = "English",

isbn = "978-82-7860-224-9",

pages = "73--76",

booktitle = "Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop",

note = "22nd Micromechanics and Microsystems Europe Workshop, MME 2011, T{\"o}nsberg, Norway, 19 - 22 June 2011 ; Conference date: 01-01-2011",

}

TY - GEN

T1 - Nanoimprinting polyimide and polymer multilayers

AU - Kolari, Kai

AU - Haatainen, Tomi

AU - Ylinen, Sami

AU - Aalto, Timo

PY - 2011

Y1 - 2011

N2 - This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

AB - This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

KW - Nanoimprinting lithography

KW - polyimide

M3 - Conference article in proceedings

SN - 978-82-7860-224-9

SP - 73

EP - 76

BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

T2 - 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011

Y2 - 1 January 2011

ER -

Nanoimprinting polyimide and polymer multilayers

Abstract

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Keywords

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Cite this