Nanoimprinting polyimide and polymer multilayers

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer
Original languageEnglish
Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
Pages73-76
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication
Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011 -
Duration: 1 Jan 2011 → …

Conference

Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011
Period1/01/11 → …

Fingerprint

polyimides
lithography
polymers
silicon
temperature

Keywords

  • Nanoimprinting lithography
  • polyimide

Cite this

Kolari, K., Haatainen, T., Ylinen, S., & Aalto, T. (2011). Nanoimprinting polyimide and polymer multilayers. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 73-76)
Kolari, Kai ; Haatainen, Tomi ; Ylinen, Sami ; Aalto, Timo. / Nanoimprinting polyimide and polymer multilayers. Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. pp. 73-76
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abstract = "This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer",
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author = "Kai Kolari and Tomi Haatainen and Sami Ylinen and Timo Aalto",
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Kolari, K, Haatainen, T, Ylinen, S & Aalto, T 2011, Nanoimprinting polyimide and polymer multilayers. in Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. pp. 73-76, 22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011, 1/01/11.

Nanoimprinting polyimide and polymer multilayers. / Kolari, Kai; Haatainen, Tomi; Ylinen, Sami; Aalto, Timo.

Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. p. 73-76.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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AB - This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer

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BT - Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop

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Kolari K, Haatainen T, Ylinen S, Aalto T. Nanoimprinting polyimide and polymer multilayers. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop. 2011. p. 73-76