Nanoimprinting polyimide and polymer multilayers

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    Abstract

    This paper presents realization of controlled features in polyimide and PMMA, which are of interest in microfabrication, by using nanoimprint lithography with a silicon stamp. The observations highlight the importance of layer thickness, imprint temperature and local pressure in order to achieve required features in a polymer
    Original languageEnglish
    Title of host publicationProceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop
    Pages73-76
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication
    Event22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011 -
    Duration: 1 Jan 2011 → …

    Conference

    Conference22nd Micromechanics and Microsystems Europe Workshop, MME 2011, Tönsberg, Norway, 19 - 22 June 2011
    Period1/01/11 → …

    Keywords

    • Nanoimprinting lithography
    • polyimide

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  • Cite this

    Kolari, K., Haatainen, T., Ylinen, S., & Aalto, T. (2011). Nanoimprinting polyimide and polymer multilayers. In Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop (pp. 73-76)