Nanolayered Al203/SiC structures tested by microtensile testing

Reijo Lappalainen, Pauli Torri, Juha-Pekka Hirvonen

Research output: Contribution to journalArticleScientific

1 Citation (Scopus)

Abstract

Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.
Original languageEnglish
Pages (from-to)897-900
JournalNanostructured Materials
Volume6
Issue number5-8
DOIs
Publication statusPublished - 1995
MoE publication typeB1 Article in a scientific magazine

Fingerprint

thin films
fibers
photolithography
nuclear reactions
tensile strength
secondary ion mass spectrometry
laminates
modulus of elasticity
backscattering
purity
heat treatment
hardness
elastic properties
sputtering
evaporation
vapor deposition
mechanical properties
crystallization
microstructure
augmentation

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Lappalainen, Reijo ; Torri, Pauli ; Hirvonen, Juha-Pekka. / Nanolayered Al203/SiC structures tested by microtensile testing. In: Nanostructured Materials. 1995 ; Vol. 6, No. 5-8. pp. 897-900.
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Nanolayered Al203/SiC structures tested by microtensile testing. / Lappalainen, Reijo; Torri, Pauli; Hirvonen, Juha-Pekka.

In: Nanostructured Materials, Vol. 6, No. 5-8, 1995, p. 897-900.

Research output: Contribution to journalArticleScientific

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AU - Torri, Pauli

AU - Hirvonen, Juha-Pekka

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N2 - Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.

AB - Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.

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