Nanolayered Al203/SiC structures tested by microtensile testing

Reijo Lappalainen; Pauli Torri; Juha-Pekka Hirvonen

doi:10.1016/0965-9773(95)00204-9

Nanolayered Al203/SiC structures tested by microtensile testing

Reijo Lappalainen, Pauli Torri, Juha-Pekka Hirvonen

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific

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Abstract

Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.

Original language	English
Pages (from-to)	897-900
Journal	Nanostructured Materials
Volume	6
Issue number	5-8
DOIs	https://doi.org/10.1016/0965-9773(95)00204-9
Publication status	Published - 1995
MoE publication type	B1 Article in a scientific magazine

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@article{e0c88262b5494da88fe2e88fa2754229,

title = "Nanolayered Al203/SiC structures tested by microtensile testing",

abstract = "Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.",

author = "Reijo Lappalainen and Pauli Torri and Juha-Pekka Hirvonen",

year = "1995",

doi = "10.1016/0965-9773(95)00204-9",

language = "English",

volume = "6",

pages = "897--900",

journal = "Nanostructured Materials",

issn = "0965-9773",

publisher = "Pergamon Press",

number = "5-8",

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TY - JOUR

T1 - Nanolayered Al203/SiC structures tested by microtensile testing

AU - Lappalainen, Reijo

AU - Torri, Pauli

AU - Hirvonen, Juha-Pekka

PY - 1995

Y1 - 1995

N2 - Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.

AB - Elastic properties of nanolayered Al2O3/SiC structures were examined using microtensile testing for self supported fiber specimens made of thin films. Multilayered thin film structures (0.86 μm) of Al2O3 and SiC were prepared with physical vapor deposition using e-gun for evaporation and ion gun for sputtering. The composition and the purity of the samples were studied with RBS and nuclear reactions. Photolithography was used to prepare fiber specimens from the thin films deposited. The stability of the multilayered structure and crystallization in heat treatment was studied by backscattering, X-ray diffraction and SIMS. Mechanical properties such as hardness, elastic modulus and ultimate tensile strength values were compared with the same parameters for similar single component films of A12O3. The preliminary results show that the Al2O3/SiC multilayer structure is maintained at high temperatures with a nanocrystalline microstructure which results in the significant enhancement of mechanical characteristics as compared to Al2O3.

U2 - 10.1016/0965-9773(95)00204-9

DO - 10.1016/0965-9773(95)00204-9

M3 - Article

VL - 6

SP - 897

EP - 900

JO - Nanostructured Materials

JF - Nanostructured Materials

SN - 0965-9773

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