Nanolayered gradient structures as an intermediate layer for diamond coatings

Jari Koskinen, Juha-Pekka Hirvonen, Simo-Pekka Hannula, Kai Pischow, Hannu Kattelus, Ilkka Suni

Research output: Contribution to journalArticleScientificpeer-review

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Abstract

A molybdenum/titanium multilayered film was used as an intermediate film between a diamond-like carbon (DLC) coating and steel and silicon substrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An attempt was thus made to obtain a smooth gradient of the elastic modulus from the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/Ti multilayer was deposited in a sputter deposition unit with two sputter targets and a rotating substrate holder. The hydrogen-free DLC coating was deposited with a pulsed arc discharge method. The Mo/Ti film was characterized by several sophisticated methods, such as cross-section scanning force microscopy, cross-section transmission electron microscopy. Rutherford Backscattering spectroscopy and nano-indentation. The film has a layered structure with a columnar growth. Preliminary tests of the mechanical properties were performed by using a scratch test. On silicon the Mo/Ti film detached at a slightly higher critical load compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluation of the mechanical properties of the sample.
Original languageEnglish
Pages (from-to)1107-1111
Number of pages5
JournalDiamond and Related Materials
Volume3
Issue number8
DOIs
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed

Fingerprint

Diamond
Diamonds
Coatings
Steel
Diamond like carbon films
Silicon
Substrates
Titanium
Carbon
Mechanical properties
Sputter deposition
Molybdenum
Rutherford backscattering spectroscopy
Nanoindentation
Hydrogen
Atomic force microscopy
Multilayers
Adhesion
Elastic moduli
Transmission electron microscopy

Cite this

Koskinen, J., Hirvonen, J-P., Hannula, S-P., Pischow, K., Kattelus, H., & Suni, I. (1994). Nanolayered gradient structures as an intermediate layer for diamond coatings. Diamond and Related Materials, 3(8), 1107-1111. https://doi.org/10.1016/0925-9635(94)90101-5
Koskinen, Jari ; Hirvonen, Juha-Pekka ; Hannula, Simo-Pekka ; Pischow, Kai ; Kattelus, Hannu ; Suni, Ilkka. / Nanolayered gradient structures as an intermediate layer for diamond coatings. In: Diamond and Related Materials. 1994 ; Vol. 3, No. 8. pp. 1107-1111.
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abstract = "A molybdenum/titanium multilayered film was used as an intermediate film between a diamond-like carbon (DLC) coating and steel and silicon substrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An attempt was thus made to obtain a smooth gradient of the elastic modulus from the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/Ti multilayer was deposited in a sputter deposition unit with two sputter targets and a rotating substrate holder. The hydrogen-free DLC coating was deposited with a pulsed arc discharge method. The Mo/Ti film was characterized by several sophisticated methods, such as cross-section scanning force microscopy, cross-section transmission electron microscopy. Rutherford Backscattering spectroscopy and nano-indentation. The film has a layered structure with a columnar growth. Preliminary tests of the mechanical properties were performed by using a scratch test. On silicon the Mo/Ti film detached at a slightly higher critical load compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluation of the mechanical properties of the sample.",
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Koskinen, J, Hirvonen, J-P, Hannula, S-P, Pischow, K, Kattelus, H & Suni, I 1994, 'Nanolayered gradient structures as an intermediate layer for diamond coatings', Diamond and Related Materials, vol. 3, no. 8, pp. 1107-1111. https://doi.org/10.1016/0925-9635(94)90101-5

Nanolayered gradient structures as an intermediate layer for diamond coatings. / Koskinen, Jari; Hirvonen, Juha-Pekka; Hannula, Simo-Pekka; Pischow, Kai; Kattelus, Hannu; Suni, Ilkka.

In: Diamond and Related Materials, Vol. 3, No. 8, 1994, p. 1107-1111.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Koskinen, Jari

AU - Hirvonen, Juha-Pekka

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AU - Suni, Ilkka

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AB - A molybdenum/titanium multilayered film was used as an intermediate film between a diamond-like carbon (DLC) coating and steel and silicon substrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An attempt was thus made to obtain a smooth gradient of the elastic modulus from the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/Ti multilayer was deposited in a sputter deposition unit with two sputter targets and a rotating substrate holder. The hydrogen-free DLC coating was deposited with a pulsed arc discharge method. The Mo/Ti film was characterized by several sophisticated methods, such as cross-section scanning force microscopy, cross-section transmission electron microscopy. Rutherford Backscattering spectroscopy and nano-indentation. The film has a layered structure with a columnar growth. Preliminary tests of the mechanical properties were performed by using a scratch test. On silicon the Mo/Ti film detached at a slightly higher critical load compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluation of the mechanical properties of the sample.

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