TY - JOUR
T1 - Nanolayered gradient structures as an intermediate layer for diamond coatings
AU - Koskinen, Jari
AU - Hirvonen, Juha-Pekka
AU - Hannula, Simo-Pekka
AU - Pischow, Kai
AU - Kattelus, Hannu
AU - Suni, Ilkka
N1 - Project code: KOT1010
PY - 1994
Y1 - 1994
N2 - A molybdenum/titanium multilayered film was used as an intermediate film between a diamond-like carbon (DLC) coating and steel and silicon substrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An attempt was thus made to obtain a smooth gradient of the elastic modulus from the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/Ti multilayer was deposited in a sputter deposition unit with two sputter targets and a rotating substrate holder. The hydrogen-free DLC coating was deposited with a pulsed arc discharge method. The Mo/Ti film was characterized by several sophisticated methods, such as cross-section scanning force microscopy, cross-section transmission electron microscopy. Rutherford Backscattering spectroscopy and nano-indentation. The film has a layered structure with a columnar growth. Preliminary tests of the mechanical properties were performed by using a scratch test. On silicon the Mo/Ti film detached at a slightly higher critical load compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluation of the mechanical properties of the sample.
AB - A molybdenum/titanium multilayered film was used as an intermediate film between a diamond-like carbon (DLC) coating and steel and silicon substrates. The elastic properties of the Mo/Ti intermediate layer were modified by using a gradient thickness of the titanium films. An attempt was thus made to obtain a smooth gradient of the elastic modulus from the substrate (steel, 210 GPa) to the DLC film (300 GPa). The Mo/Ti multilayer was deposited in a sputter deposition unit with two sputter targets and a rotating substrate holder. The hydrogen-free DLC coating was deposited with a pulsed arc discharge method. The Mo/Ti film was characterized by several sophisticated methods, such as cross-section scanning force microscopy, cross-section transmission electron microscopy. Rutherford Backscattering spectroscopy and nano-indentation. The film has a layered structure with a columnar growth. Preliminary tests of the mechanical properties were performed by using a scratch test. On silicon the Mo/Ti film detached at a slightly higher critical load compared with the DLC film with no intermediate film. However, poor adhesion of the Mo/Ti film to the steel substrate prevented evaluation of the mechanical properties of the sample.
U2 - 10.1016/0925-9635(94)90101-5
DO - 10.1016/0925-9635(94)90101-5
M3 - Article
SN - 0925-9635
VL - 3
SP - 1107
EP - 1111
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 8
ER -