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Keyphrases
Nanolayers
100%
Gradient Structure
100%
Mo-Ti
100%
Diamond Coating
100%
Diamond-like
80%
Ti Film
60%
Carbon Coating
40%
Mechanical Properties
40%
Carbon Film
40%
Steel Substrate
40%
Adhesion
20%
Rutile
20%
Substrate Holder
20%
Carbon Steel
20%
Titanium Film
20%
Molybdenum
20%
Scratch Test
20%
Elastic Modulus
20%
Rutherford Backscattering Spectrometry
20%
Silicon Substrate
20%
Layered Structure
20%
Nanoindentation
20%
Multilayered Films
20%
Elastic Properties
20%
Transmission Electron Microscopy
20%
Hydrogen-free
20%
Sputter Deposition
20%
Arc-discharge Method
20%
Pulsed Arc Discharge
20%
Scanning Force Microscopy
20%
Sputtering Target
20%
Rotating Substrate
20%
Smooth Gradient
20%
Gradient Thickness
20%
Columnar Growth
20%
INIS
layers
100%
diamonds
100%
coatings
100%
films
100%
carbon
40%
substrates
40%
steels
30%
silicon
20%
mechanical properties
20%
titanium
20%
sputtering
20%
cross sections
20%
pressure range giga pa
20%
comparative evaluations
10%
thickness
10%
growth
10%
hydrogen
10%
adhesion
10%
deposition
10%
transmission electron microscopy
10%
evaluation
10%
units
10%
molybdenum
10%
microscopy
10%
rutherford backscattering spectroscopy
10%
elastic properties
10%
Engineering
Diamond-Like Carbon
100%
Intermediate Layer
100%
Cross Section
50%
Silicon Substrate
25%
Layered Structure
25%
Pulsed Arc
25%
Indentation
25%
Critical Load
25%
Modulus of Elasticity
25%
Material Science
Film
100%
Diamond
100%
Diamond-Like Carbon Coating
25%
Diamond Like Carbon Films
25%
Silicon
25%
Titanium
25%
Elastic Moduli
12%
Nanoindentation
12%
Molybdenum
12%
Sputter Deposition
12%
Transmission Electron Microscopy
12%
Elastic Property
12%