Nanomechanical shaft-loading blister testing of thin films

M. Berdova, A. Baby, J. Lyytinen, Kestas Grigoras, L. Kilpi, Helena Ronkainen, J. Koskinen, S. Franssila

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	AVS 59th International Symposium & Exhibition - Tampa, United States Duration: 28 Oct 2012 → 2 Nov 2012

Conference	AVS 59th International Symposium & Exhibition
Country/Territory	United States
City	Tampa
Period	28/10/12 → 2/11/12

Cite this

@conference{644eccb67af34d0e9fa3b07d9dc60c28,

title = "Nanomechanical shaft-loading blister testing of thin films",

author = "M. Berdova and A. Baby and J. Lyytinen and Kestas Grigoras and L. Kilpi and Helena Ronkainen and J. Koskinen and S. Franssila",

note = "Project code: 74717; AVS 59th International Symposium & Exhibition ; Conference date: 28-10-2012 Through 02-11-2012",

year = "2012",

language = "English",

}

TY - CONF

T1 - Nanomechanical shaft-loading blister testing of thin films

AU - Berdova, M.

AU - Baby, A.

AU - Lyytinen, J.

AU - Grigoras, Kestas

AU - Kilpi, L.

AU - Ronkainen, Helena

AU - Koskinen, J.

AU - Franssila, S.

N1 - Project code: 74717

PY - 2012

Y1 - 2012

M3 - Conference article

T2 - AVS 59th International Symposium & Exhibition

Y2 - 28 October 2012 through 2 November 2012

ER -