Nanomechanical shaft-loading blister testing of thin films

M. Berdova, A. Baby, J. Lyytinen, Kestas Grigoras, L. Kilpi, Helena Ronkainen, J. Koskinen, S. Franssila

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventAVS 59th International Symposium & Exhibition - Tampa, United States
    Duration: 28 Oct 20122 Nov 2012


    ConferenceAVS 59th International Symposium & Exhibition
    Country/TerritoryUnited States

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