Nanomechanical shaft-loading blister testing of thin films

M. Berdova, A. Baby, J. Lyytinen, Kestas Grigoras, L. Kilpi, Helena Ronkainen, J. Koskinen, S. Franssila

Research output: Contribution to conferenceConference articleScientific

Original languageEnglish
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventAVS 59th International Symposium & Exhibition - Tampa, United States
Duration: 28 Oct 20122 Nov 2012

Conference

ConferenceAVS 59th International Symposium & Exhibition
CountryUnited States
CityTampa
Period28/10/122/11/12

Cite this

Berdova, M., Baby, A., Lyytinen, J., Grigoras, K., Kilpi, L., Ronkainen, H., ... Franssila, S. (2012). Nanomechanical shaft-loading blister testing of thin films. Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States.
Berdova, M. ; Baby, A. ; Lyytinen, J. ; Grigoras, Kestas ; Kilpi, L. ; Ronkainen, Helena ; Koskinen, J. ; Franssila, S. / Nanomechanical shaft-loading blister testing of thin films. Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States.
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title = "Nanomechanical shaft-loading blister testing of thin films",
author = "M. Berdova and A. Baby and J. Lyytinen and Kestas Grigoras and L. Kilpi and Helena Ronkainen and J. Koskinen and S. Franssila",
note = "Project code: 74717; AVS 59th International Symposium & Exhibition ; Conference date: 28-10-2012 Through 02-11-2012",
year = "2012",
language = "English",

}

Berdova, M, Baby, A, Lyytinen, J, Grigoras, K, Kilpi, L, Ronkainen, H, Koskinen, J & Franssila, S 2012, 'Nanomechanical shaft-loading blister testing of thin films' Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States, 28/10/12 - 2/11/12, .

Nanomechanical shaft-loading blister testing of thin films. / Berdova, M.; Baby, A.; Lyytinen, J.; Grigoras, Kestas; Kilpi, L.; Ronkainen, Helena; Koskinen, J.; Franssila, S.

2012. Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States.

Research output: Contribution to conferenceConference articleScientific

TY - CONF

T1 - Nanomechanical shaft-loading blister testing of thin films

AU - Berdova, M.

AU - Baby, A.

AU - Lyytinen, J.

AU - Grigoras, Kestas

AU - Kilpi, L.

AU - Ronkainen, Helena

AU - Koskinen, J.

AU - Franssila, S.

N1 - Project code: 74717

PY - 2012

Y1 - 2012

M3 - Conference article

ER -

Berdova M, Baby A, Lyytinen J, Grigoras K, Kilpi L, Ronkainen H et al. Nanomechanical shaft-loading blister testing of thin films. 2012. Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States.