Nanomechanical shaft-loading blister testing of thin films

M. Berdova, A. Baby, J. Lyytinen, Kestas Grigoras, L. Kilpi, Helena Ronkainen, J. Koskinen, S. Franssila

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventAVS 59th International Symposium & Exhibition - Tampa, United States
    Duration: 28 Oct 20122 Nov 2012

    Conference

    ConferenceAVS 59th International Symposium & Exhibition
    CountryUnited States
    CityTampa
    Period28/10/122/11/12

    Cite this

    Berdova, M., Baby, A., Lyytinen, J., Grigoras, K., Kilpi, L., Ronkainen, H., Koskinen, J., & Franssila, S. (2012). Nanomechanical shaft-loading blister testing of thin films. Paper presented at AVS 59th International Symposium & Exhibition, Tampa, United States.