Nanometer-thick textured ZnO films

Preparation, characterization and interaction with ethanol vapor

D. Naumenko (Corresponding Author), V. Snitka (Corresponding Author), A. Ulcinas, I. Naumenko, Kestutis Grigoras

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.
Original languageEnglish
Pages (from-to)96-102
Number of pages6
JournalTheoretical and Experimental Chemistry
Volume49
Issue number2
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible

Fingerprint

Film preparation
Surface waves
Ethanol
Vapors
Acoustic waves
Atomic layer deposition
Chemical sensors
Frequency response
Amplification
Transducers
Microscopic examination
Acoustics
Spectroscopy
X ray diffraction
Thin films
Coatings
Scanning electron microscopy
Substrates
Temperature

Keywords

  • atomic layer deposition
  • piezoresponse force microscopy
  • thin films
  • zinc oxide films

Cite this

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title = "Nanometer-thick textured ZnO films: Preparation, characterization and interaction with ethanol vapor",
abstract = "A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.",
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author = "D. Naumenko and V. Snitka and A. Ulcinas and I. Naumenko and Kestutis Grigoras",
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Nanometer-thick textured ZnO films : Preparation, characterization and interaction with ethanol vapor. / Naumenko, D. (Corresponding Author); Snitka, V. (Corresponding Author); Ulcinas, A.; Naumenko, I.; Grigoras, Kestutis.

In: Theoretical and Experimental Chemistry, Vol. 49, No. 2, 2013, p. 96-102.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Nanometer-thick textured ZnO films

T2 - Preparation, characterization and interaction with ethanol vapor

AU - Naumenko, D.

AU - Snitka, V.

AU - Ulcinas, A.

AU - Naumenko, I.

AU - Grigoras, Kestutis

PY - 2013

Y1 - 2013

N2 - A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.

AB - A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.

KW - atomic layer deposition

KW - piezoresponse force microscopy

KW - thin films

KW - zinc oxide films

U2 - 10.1007/s11237-013-9300-3

DO - 10.1007/s11237-013-9300-3

M3 - Article

VL - 49

SP - 96

EP - 102

JO - Theoretical and Experimental Chemistry

JF - Theoretical and Experimental Chemistry

SN - 0040-5760

IS - 2

ER -