A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.
- atomic layer deposition
- piezoresponse force microscopy
- thin films
- zinc oxide films