Nanometer-thick textured ZnO films: Preparation, characterization and interaction with ethanol vapor

D. Naumenko (Corresponding Author), V. Snitka (Corresponding Author), A. Ulcinas, I. Naumenko, Kestutis Grigoras

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

A study was carried out on the effect of the reaction temperature in atomic layer deposition on the structural and piezoelectric properties of thin ZnO films (5–50 nm) by scanning electron microscopy, X-ray diffraction, piezoresponse force microscopy, and surface acoustic wave (SAW) spectroscopy. The piezoresponse was shown to be mainly a function of ZnO grain size and the monocrystalline structure perpendicular to the substrate plane. The results demonstrate promise for the use of textured ZnO films as sensitive coatings for acoustic gas sensors in instruments based on the SAW transducer amplification-frequency response.
Original languageEnglish
Pages (from-to)96-102
Number of pages6
JournalTheoretical and Experimental Chemistry
Volume49
Issue number2
DOIs
Publication statusPublished - 2013
MoE publication typeNot Eligible

Keywords

  • atomic layer deposition
  • piezoresponse force microscopy
  • thin films
  • zinc oxide films

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