| Original language | English |
|---|---|
| Title of host publication | Chemical Vapor Deposition XVI and EUROCVD 14: Proceedings of International symposium |
| Subtitle of host publication | Paris, France, 27 April - 2 May 2003 |
| Publisher | Electrochemical Society ECS |
| Pages | 1131-1137 |
| ISBN (Print) | 1-56677-378-4 |
| Publication status | Published - 2003 |
| MoE publication type | A4 Article in a conference publication |
Publication series
| Series | ECS Proceedings Volumes |
|---|---|
| Volume | 2003-08 |
| ISSN | 2576-1579 |