Nanotribological, nanomechanical and interfacial characterization of Atomic Layer Deposited TiO2 on a silicon substrate

Jussi Lyytinen (Corresponding Author), Xuwen Liu, Oili M E Ylivaara, Sakari Sintonen, Ajai Iyer, Saima Ali, Jaakko Julin, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen, Jari Koskinen

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