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Nanotribological, nanomechanical and interfacial characterization of Atomic Layer Deposited TiO2 on a silicon substrate
Jussi Lyytinen (Corresponding Author), Xuwen Liu, Oili M.E. Ylivaara, Sakari Sintonen, Ajai Iyer, Saima Ali, Jaakko Julin, Harri Lipsanen, Timo Sajavaara, Riikka L. Puurunen, Jari Koskinen
Research output: Contribution to journal › Article › Scientific › peer-review
15
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(Scopus)