Negative tone hybrid sol-gel material for electron-beam lithography

Juha Rantala (Corresponding Author), R.S. Penner, Seppo Honkanen, Jouko Vähäkangas, M. Fallahi, Nasser Peyghambarian

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Negative tone hybrid sol-gel material for electron-beam lithography'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds