Abstract
The main application of FBAR (thin film bulk acoustic
wave resonator) is in telecommunications. These new FBAR
filters with their light weight and small size will
replace the currently used bulky ceramic filters in
mobile telephone handsets. FBAR filters show promise to
be even smaller and have higher performance than SAW
(surface acoustic wave) filters. Two different approaches
of FBAR filters are reviewed and compared; bridge type
technology and acoustic mirror based technology. The idea
of using CMP (chemical mechanical polishing) smoothening
to improve the quality of FBAR will be presented as well
as the preliminary results achieved.
| Original language | English |
|---|---|
| Title of host publication | The Nano-Micro Interface |
| Subtitle of host publication | Bridging the Micro and Nano Worlds |
| Editors | Hans-Jörg Fetch, Matthias Werner |
| Place of Publication | Weinheim |
| Publisher | Wiley-VCH Verlag |
| Chapter | 14 |
| Pages | 181-193 |
| ISBN (Electronic) | 978-3-527-60411-1 |
| ISBN (Print) | 978-3-527-30978-8 |
| DOIs | |
| Publication status | Published - 2004 |
| MoE publication type | A3 Part of a book or another research book |