The main application of FBAR (thin film bulk acoustic wave resonator) is in telecommunications. These new FBAR filters with their light weight and small size will replace the currently used bulky ceramic filters in mobile telephone handsets. FBAR filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of FBAR filters are reviewed and compared; bridge type technology and acoustic mirror based technology. The idea of using CMP (chemical mechanical polishing) smoothening to improve the quality of FBAR will be presented as well as the preliminary results achieved.
|Title of host publication||The Nano-Micro Interface|
|Subtitle of host publication||Bridging the Micro and Nano Worlds|
|Editors||Hans-Jörg Fetch, Matthias Werner|
|Place of Publication||Weinheim|
|Publication status||Published - 2004|
|MoE publication type||A3 Part of a book or another research book|
Molarius, J., Kulawski, M., Pensala, T., & Ylilammi, M. (2004). New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing. In H-J. Fetch, & M. Werner (Eds.), The Nano-Micro Interface: Bridging the Micro and Nano Worlds (pp. 181-193). https://doi.org/10.1002/3527604111.ch14