New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing

Jyrki Molarius, Martin Kulawski, Tuomas Pensala, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    The main application of FBAR (thin film bulk acoustic wave resonator) is in telecommunications. These new FBAR filters with their light weight and small size will replace the currently used bulky ceramic filters in mobile telephone handsets. FBAR filters show promise to be even smaller and have higher performance than SAW (surface acoustic wave) filters. Two different approaches of FBAR filters are reviewed and compared; bridge type technology and acoustic mirror based technology. The idea of using CMP (chemical mechanical polishing) smoothening to improve the quality of FBAR will be presented as well as the preliminary results achieved.
    Original languageEnglish
    Title of host publicationThe Nano-Micro Interface
    Subtitle of host publicationBridging the Micro and Nano Worlds
    EditorsHans-Jörg Fetch, Matthias Werner
    Place of PublicationWeinheim
    Chapter14
    Pages181-193
    ISBN (Electronic)978-3-527-60411-1
    DOIs
    Publication statusPublished - 2004
    MoE publication typeA3 Part of a book or another research book

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