New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing

Jyrki Molarius, Martin Kulawski, Tuomas Pensala, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    2 Citations (Scopus)

    Fingerprint Dive into the research topics of 'New approach to improve the piezoelectric quality of ZnO resonator by chemomechanical polishing'. Together they form a unique fingerprint.

    Physics & Astronomy