New MEMS pressure sensor element and concept for coronary catheter

Anu Kärkkäinen, Jaakko Saarilahti, Jukka Kyynäräinen, Heikki Kuisma (Corresponding Author)

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Abstract

We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.
Original languageEnglish
Pages (from-to)76-79
JournalProcedia Engineering
Volume168
DOIs
Publication statusPublished - 2016
MoE publication typeA1 Journal article-refereed
Event30th Anniversary Eurosensors Conference, EUROSENSORS 2016 - Budapest, Hungary
Duration: 4 Sep 20167 Sep 2016
https://www.sciencedirect.com/journal/procedia-engineering/vol/168

Fingerprint

Catheters
Pressure sensors
MEMS
Wire
Fabrication
Capacitive sensors
Mountings
Innovation

Keywords

  • MEMS
  • FFR
  • pressure sensor
  • coronary catheter
  • surface micromachin

Cite this

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New MEMS pressure sensor element and concept for coronary catheter. / Kärkkäinen, Anu; Saarilahti, Jaakko; Kyynäräinen, Jukka; Kuisma, Heikki (Corresponding Author).

In: Procedia Engineering, Vol. 168, 2016, p. 76-79.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - New MEMS pressure sensor element and concept for coronary catheter

AU - Kärkkäinen, Anu

AU - Saarilahti, Jaakko

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

PY - 2016

Y1 - 2016

N2 - We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.

AB - We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.

KW - MEMS

KW - FFR

KW - pressure sensor

KW - coronary catheter

KW - surface micromachin

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DO - 10.1016/j.proeng.2016.11.151

M3 - Article

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JF - Procedia Engineering

SN - 1877-7058

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