New MEMS pressure sensor element and concept for coronary catheter

Anu Kärkkäinen, Jaakko Saarilahti, Jukka Kyynäräinen, Heikki Kuisma (Corresponding Author)

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)

    Abstract

    We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.
    Original languageEnglish
    Pages (from-to)76-79
    JournalProcedia Engineering
    Volume168
    DOIs
    Publication statusPublished - 2016
    MoE publication typeA1 Journal article-refereed
    Event30th Anniversary Eurosensors Conference, EUROSENSORS 2016 - Budapest, Hungary
    Duration: 4 Sep 20167 Sep 2016
    https://www.sciencedirect.com/journal/procedia-engineering/vol/168

    Keywords

    • MEMS
    • FFR
    • pressure sensor
    • coronary catheter
    • surface micromachin
    • OtaNano

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