New MEMS pressure sensor element and concept for coronary catheter

Anu Kärkkäinen; Jaakko Saarilahti; Jukka Kyynäräinen; Heikki Kuisma

doi:10.1016/j.proeng.2016.11.151

New MEMS pressure sensor element and concept for coronary catheter

Anu Kärkkäinen, Jaakko Saarilahti, Jukka Kyynäräinen, Heikki Kuisma (Corresponding Author)

Murata Electronics Oy

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.

Original language	English
Pages (from-to)	76-79
Journal	Procedia Engineering
Volume	168
DOIs	https://doi.org/10.1016/j.proeng.2016.11.151
Publication status	Published - 2016
MoE publication type	A1 Journal article-refereed
Event	30th Anniversary Eurosensors Conference, EUROSENSORS 2016 - Budapest, Hungary Duration: 4 Sept 2016 → 7 Sept 2016 https://www.sciencedirect.com/journal/procedia-engineering/vol/168

Keywords

MEMS
FFR
pressure sensor
coronary catheter
surface micromachin
OtaNano

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10.1016/j.proeng.2016.11.151

OtaNano
VTT Technical Research Centre of Finland
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title = "New MEMS pressure sensor element and concept for coronary catheter",

abstract = "We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.",

keywords = "MEMS, FFR, pressure sensor, coronary catheter, surface micromachin, OtaNano",

author = "Anu K{\"a}rkk{\"a}inen and Jaakko Saarilahti and Jukka Kyyn{\"a}r{\"a}inen and Heikki Kuisma",

year = "2016",

doi = "10.1016/j.proeng.2016.11.151",

language = "English",

volume = "168",

pages = "76--79",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier",

note = "30th Anniversary Eurosensors Conference, EUROSENSORS 2016, EUROSENSORS 2016 ; Conference date: 04-09-2016 Through 07-09-2016",

url = "https://www.sciencedirect.com/journal/procedia-engineering/vol/168",

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TY - JOUR

T1 - New MEMS pressure sensor element and concept for coronary catheter

AU - Kärkkäinen, Anu

AU - Saarilahti, Jaakko

AU - Kyynäräinen, Jukka

AU - Kuisma, Heikki

PY - 2016

Y1 - 2016

N2 - We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.

AB - We report a capacitive pressure sensor to be integrated in a FFR catheter. The novelty presented in this work is based on two innovations: (1) VTT surface micromachined process used in fabrication of a ultrathin and narrow pressure sensor element and (2) mounting of the pressure sensor on the catheter sidewall instead of the guide wire enabling thus to use standard guide wires. Two design and fabrication runs were accomplished. The measurement results of the MEMS pressure sensor element correlate well with the calculated and simulated results.

KW - MEMS

KW - FFR

KW - pressure sensor

KW - coronary catheter

KW - surface micromachin

KW - OtaNano

U2 - 10.1016/j.proeng.2016.11.151

DO - 10.1016/j.proeng.2016.11.151

M3 - Article

SN - 1877-7058

VL - 168

SP - 76

EP - 79

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 30th Anniversary Eurosensors Conference, EUROSENSORS 2016

Y2 - 4 September 2016 through 7 September 2016

ER -

New MEMS pressure sensor element and concept for coronary catheter

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