New methods to fabricate multilayer silicon wafers

Kimmo Henttinen

Research output: Contribution to journalArticle

Original languageEnglish
Article number16
JournalIndustrial Horizons
Issue numberMarch
Publication statusPublished - 2002
MoE publication typeD1 Article in a trade journal

Keywords

  • Wafer bonding
  • silicon on insulator (SOI) wafer

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