New methods to fabricate multilayer silicon wafers

Kimmo Henttinen

Research output: Contribution to journalArticleProfessional

Original languageEnglish
Article number16
JournalIndustrial Horizons
Issue numberMarch
Publication statusPublished - 2002
MoE publication typeD1 Article in a trade journal

Keywords

  • Wafer bonding
  • silicon on insulator (SOI) wafer

Cite this

Henttinen, Kimmo. / New methods to fabricate multilayer silicon wafers. In: Industrial Horizons. 2002 ; No. March .
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title = "New methods to fabricate multilayer silicon wafers",
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author = "Kimmo Henttinen",
note = "Project code: T2SU00141",
year = "2002",
language = "English",
journal = "VTT Impulse",
issn = "1798-0178",
publisher = "VTT Technical Research Centre of Finland",
number = "March",

}

New methods to fabricate multilayer silicon wafers. / Henttinen, Kimmo.

In: Industrial Horizons, No. March , 16, 2002.

Research output: Contribution to journalArticleProfessional

TY - JOUR

T1 - New methods to fabricate multilayer silicon wafers

AU - Henttinen, Kimmo

N1 - Project code: T2SU00141

PY - 2002

Y1 - 2002

KW - Wafer bonding

KW - silicon on insulator (SOI) wafer

M3 - Article

JO - VTT Impulse

JF - VTT Impulse

SN - 1798-0178

IS - March

M1 - 16

ER -