New methods to fabricate multilayer silicon wafers

Kimmo Henttinen

Research output: Contribution to journal › Article › Professional

Keywords

@article{996223d9630c409eb023ff804837a4d1,

title = "New methods to fabricate multilayer silicon wafers",

keywords = "Wafer bonding, silicon on insulator (SOI) wafer",

author = "Kimmo Henttinen",

note = "Project code: T2SU00141",

year = "2002",

language = "English",

journal = "Industrial Horizons",

issn = "1235-127X",

publisher = "VTT Technical Research Centre of Finland",

number = "March ",

}