New microelectronics cleanroom facility in Otaniemi: User's view on the building process

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication34th R3-Nordic Contamination Control Symposium
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages299-310
    ISBN (Electronic)951-38-6285-2
    ISBN (Print)951-38-6284-4
    Publication statusPublished - 2003
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
    Duration: 2 Jun 20034 Jun 2003

    Publication series

    SeriesVTT Symposium
    Number229
    ISSN0357-9387

    Conference

    Conference34th R3-Nordic Contamination Control Symposium
    CountryFinland
    CityTurku
    Period2/06/034/06/03

    Cite this

    Gyllenberg, U. (2003). New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium (pp. 299-310). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 229
    Gyllenberg, Ulrika. / New microelectronics cleanroom facility in Otaniemi : User's view on the building process. 34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. pp. 299-310 (VTT Symposium; No. 229).
    @inproceedings{03e267f4491c43a99590fc0bc42f6859,
    title = "New microelectronics cleanroom facility in Otaniemi: User's view on the building process",
    author = "Ulrika Gyllenberg",
    year = "2003",
    language = "English",
    isbn = "951-38-6284-4",
    series = "VTT Symposium",
    publisher = "VTT Technical Research Centre of Finland",
    number = "229",
    pages = "299--310",
    booktitle = "34th R3-Nordic Contamination Control Symposium",
    address = "Finland",

    }

    Gyllenberg, U 2003, New microelectronics cleanroom facility in Otaniemi: User's view on the building process. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 299-310, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03.

    New microelectronics cleanroom facility in Otaniemi : User's view on the building process. / Gyllenberg, Ulrika.

    34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. p. 299-310 (VTT Symposium; No. 229).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    TY - GEN

    T1 - New microelectronics cleanroom facility in Otaniemi

    T2 - User's view on the building process

    AU - Gyllenberg, Ulrika

    PY - 2003

    Y1 - 2003

    M3 - Conference article in proceedings

    SN - 951-38-6284-4

    T3 - VTT Symposium

    SP - 299

    EP - 310

    BT - 34th R3-Nordic Contamination Control Symposium

    PB - VTT Technical Research Centre of Finland

    CY - Espoo

    ER -

    Gyllenberg U. New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland. 2003. p. 299-310. (VTT Symposium; No. 229).