| Original language | English |
|---|---|
| Title of host publication | 34th R3-Nordic Contamination Control Symposium |
| Place of Publication | Espoo |
| Publisher | VTT Technical Research Centre of Finland |
| Pages | 299-310 |
| ISBN (Electronic) | 951-38-6285-2 |
| ISBN (Print) | 951-38-6284-4 |
| Publication status | Published - 2003 |
| MoE publication type | B3 Non-refereed article in conference proceedings |
| Event | 34th R3-Nordic Contamination Control Symposium - Turku, Finland Duration: 2 Jun 2003 → 4 Jun 2003 |
Publication series
| Series | VTT Symposium |
|---|---|
| Number | 229 |
| ISSN | 0357-9387 |
Conference
| Conference | 34th R3-Nordic Contamination Control Symposium |
|---|---|
| Country | Finland |
| City | Turku |
| Period | 2/06/03 → 4/06/03 |
Cite this
Gyllenberg, U. (2003). New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium (pp. 299-310). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 229
@inproceedings{03e267f4491c43a99590fc0bc42f6859,
title = "New microelectronics cleanroom facility in Otaniemi: User's view on the building process",
author = "Ulrika Gyllenberg",
year = "2003",
language = "English",
isbn = "951-38-6284-4",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "229",
pages = "299--310",
booktitle = "34th R3-Nordic Contamination Control Symposium",
address = "Finland",
}
Gyllenberg, U 2003, New microelectronics cleanroom facility in Otaniemi: User's view on the building process. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 299-310, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03.
New microelectronics cleanroom facility in Otaniemi : User's view on the building process. / Gyllenberg, Ulrika.
34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. p. 299-310 (VTT Symposium; No. 229).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific
TY - GEN
T1 - New microelectronics cleanroom facility in Otaniemi
T2 - User's view on the building process
AU - Gyllenberg, Ulrika
PY - 2003
Y1 - 2003
M3 - Conference article in proceedings
SN - 951-38-6284-4
T3 - VTT Symposium
SP - 299
EP - 310
BT - 34th R3-Nordic Contamination Control Symposium
PB - VTT Technical Research Centre of Finland
CY - Espoo
ER -
Gyllenberg U. New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland. 2003. p. 299-310. (VTT Symposium; No. 229).