New microelectronics cleanroom facility in Otaniemi: User's view on the building process

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication34th R3-Nordic Contamination Control Symposium
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages299-310
ISBN (Electronic)951-38-6285-2
ISBN (Print)951-38-6284-4
Publication statusPublished - 2003
MoE publication typeB3 Non-refereed article in conference proceedings
Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
Duration: 2 Jun 20034 Jun 2003

Publication series

SeriesVTT Symposium
Number229
ISSN0357-9387

Conference

Conference34th R3-Nordic Contamination Control Symposium
CountryFinland
CityTurku
Period2/06/034/06/03

Cite this

Gyllenberg, U. (2003). New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium (pp. 299-310). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 229
Gyllenberg, Ulrika. / New microelectronics cleanroom facility in Otaniemi : User's view on the building process. 34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. pp. 299-310 (VTT Symposium; No. 229).
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author = "Ulrika Gyllenberg",
year = "2003",
language = "English",
isbn = "951-38-6284-4",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "229",
pages = "299--310",
booktitle = "34th R3-Nordic Contamination Control Symposium",
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}

Gyllenberg, U 2003, New microelectronics cleanroom facility in Otaniemi: User's view on the building process. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 299-310, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03.

New microelectronics cleanroom facility in Otaniemi : User's view on the building process. / Gyllenberg, Ulrika.

34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. p. 299-310 (VTT Symposium; No. 229).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - New microelectronics cleanroom facility in Otaniemi

T2 - User's view on the building process

AU - Gyllenberg, Ulrika

PY - 2003

Y1 - 2003

M3 - Conference article in proceedings

SN - 951-38-6284-4

T3 - VTT Symposium

SP - 299

EP - 310

BT - 34th R3-Nordic Contamination Control Symposium

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Gyllenberg U. New microelectronics cleanroom facility in Otaniemi: User's view on the building process. In 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland. 2003. p. 299-310. (VTT Symposium; No. 229).