New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

M. Pizzi, V. Koniachkine, Omar de Martiis, Ralf Marbach

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

12 Citations (Scopus)

Abstract

A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.
Original languageEnglish
Title of host publicationIEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages173-174
ISBN (Print)978-0-7803-7830-8
DOIs
Publication statusPublished - 2003
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States
Duration: 18 Aug 200321 Aug 2003

Conference

ConferenceInternational Conference on Optical MEMS, MOEMS 2003
Abbreviated titleMOEMS 2003
Country/TerritoryUnited States
CityWaikoloa
Period18/08/0321/08/03

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