Abstract
A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.
Original language | English |
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Title of host publication | IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003) |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 173-174 |
ISBN (Print) | 978-0-7803-7830-8 |
DOIs | |
Publication status | Published - 2003 |
MoE publication type | A4 Article in a conference publication |
Event | International Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003 |
Conference
Conference | International Conference on Optical MEMS, MOEMS 2003 |
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Abbreviated title | MOEMS 2003 |
Country/Territory | United States |
City | Waikoloa |
Period | 18/08/03 → 21/08/03 |