New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

M. Pizzi; V. Koniachkine; Omar de Martiis; Ralf Marbach

doi:10.1109/OMEMS.2003.1233521

New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

M. Pizzi
, V. Koniachkine
, Omar de Martiis
, Ralf Marbach

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

13 Citations (Scopus)

Abstract

A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.

Original language	English
Title of host publication	IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	173-174
ISBN (Print)	978-0-7803-7830-8
DOIs	https://doi.org/10.1109/OMEMS.2003.1233521
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication
Event	International Conference on Optical MEMS, MOEMS 2003 - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Conference

Conference	International Conference on Optical MEMS, MOEMS 2003
Abbreviated title	MOEMS 2003
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

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10.1109/OMEMS.2003.1233521

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@inproceedings{67d4405237804a0980208c9a4b1caaa0,

title = "New type of micro-mechanical shutter array for replacement of infrared photodetector arrays",

abstract = "A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.",

author = "M. Pizzi and V. Koniachkine and \{de Martiis\}, Omar and Ralf Marbach",

year = "2003",

doi = "10.1109/OMEMS.2003.1233521",

language = "English",

isbn = "978-0-7803-7830-8",

pages = "173--174",

booktitle = "IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "International Conference on Optical MEMS, MOEMS 2003, MOEMS 2003 ; Conference date: 18-08-2003 Through 21-08-2003",

}

Pizzi, M, Koniachkine, V, de Martiis, O & Marbach, R 2003, New type of micro-mechanical shutter array for replacement of infrared photodetector arrays. in IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003). IEEE Institute of Electrical and Electronic Engineers, pp. 173-174, International Conference on Optical MEMS, MOEMS 2003, Waikoloa, Hawaii, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233521

New type of micro-mechanical shutter array for replacement of infrared photodetector arrays. / Pizzi, M.; Koniachkine, V.; de Martiis, Omar et al.
IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003). IEEE Institute of Electrical and Electronic Engineers, 2003. p. 173-174.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

AU - Pizzi, M.

AU - Koniachkine, V.

AU - de Martiis, Omar

AU - Marbach, Ralf

PY - 2003

Y1 - 2003

N2 - A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.

AB - A new type of low-cost MEMS shutter array has become available that can be used as an alternative to photodetector arrays. The new MEMS array reduces part cost to a point where infrared sensing seems possible even in consumer-type applications.

U2 - 10.1109/OMEMS.2003.1233521

DO - 10.1109/OMEMS.2003.1233521

M3 - Conference article in proceedings

SN - 978-0-7803-7830-8

SP - 173

EP - 174

BT - IEEE/LEOS International Conference on Optical MEMS (MOEMS 2003)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - International Conference on Optical MEMS, MOEMS 2003

Y2 - 18 August 2003 through 21 August 2003

ER -

New type of micro-mechanical shutter array for replacement of infrared photodetector arrays

Abstract

Conference

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