Noise suppression of MEMS readout near pull-in

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Abstract

    We show that electromechanical feedback in MEMS sensors can be used to eliminate the noise of the readout electronics near the pull-in point, at which the force-to-displacement gain of the system becomes infinite. Displacement bias through electrical feedback instead of voltage bias allows stable operation up to and above the pull-in point. Experimentally, the electronics contribution to system resolution was suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
    Original languageEnglish
    Pages (from-to)101-104
    Number of pages3
    JournalSensors and Actuators A: Physical
    Volume183
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

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    Keywords

    • Capacitive sensors
    • MEMS
    • noise
    • pull-in
    • readout

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