Noise suppression of MEMS readout near pull-in

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Abstract

We show that electromechanical feedback in MEMS sensors can be used to eliminate the noise of the readout electronics near the pull-in point, at which the force-to-displacement gain of the system becomes infinite. Displacement bias through electrical feedback instead of voltage bias allows stable operation up to and above the pull-in point. Experimentally, the electronics contribution to system resolution was suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.
Original languageEnglish
Pages (from-to)101-104
Number of pages3
JournalSensors and Actuators A: Physical
Volume183
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
readout
Electronic equipment
retarding
Microphones
microphones
electronics
Feedback
sensors
Sensors
Pressure sensors
accelerometers
pressure sensors
Bias voltage
Accelerometers
electric potential

Keywords

  • Capacitive sensors
  • MEMS
  • noise
  • pull-in
  • readout

Cite this

@article{9715e292faa94861afd513a509177186,
title = "Noise suppression of MEMS readout near pull-in",
abstract = "We show that electromechanical feedback in MEMS sensors can be used to eliminate the noise of the readout electronics near the pull-in point, at which the force-to-displacement gain of the system becomes infinite. Displacement bias through electrical feedback instead of voltage bias allows stable operation up to and above the pull-in point. Experimentally, the electronics contribution to system resolution was suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.",
keywords = "Capacitive sensors, MEMS, noise, pull-in, readout",
author = "Panu Helist{\"o} and Hannu Sipola and Heikki Sepp{\"a}",
year = "2012",
doi = "10.1016/j.sna.2012.05.015",
language = "English",
volume = "183",
pages = "101--104",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

Noise suppression of MEMS readout near pull-in. / Helistö, Panu (Corresponding Author); Sipola, Hannu; Seppä, Heikki.

In: Sensors and Actuators A: Physical, Vol. 183, 2012, p. 101-104.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Noise suppression of MEMS readout near pull-in

AU - Helistö, Panu

AU - Sipola, Hannu

AU - Seppä, Heikki

PY - 2012

Y1 - 2012

N2 - We show that electromechanical feedback in MEMS sensors can be used to eliminate the noise of the readout electronics near the pull-in point, at which the force-to-displacement gain of the system becomes infinite. Displacement bias through electrical feedback instead of voltage bias allows stable operation up to and above the pull-in point. Experimentally, the electronics contribution to system resolution was suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.

AB - We show that electromechanical feedback in MEMS sensors can be used to eliminate the noise of the readout electronics near the pull-in point, at which the force-to-displacement gain of the system becomes infinite. Displacement bias through electrical feedback instead of voltage bias allows stable operation up to and above the pull-in point. Experimentally, the electronics contribution to system resolution was suppressed by an order of magnitude, reaching the intrinsic resolution of the MEMS microphone. The technique allows the use of standard integrated electronics with noise-critical MEMS sensors, such as microphones, pressure sensors and accelerometers.

KW - Capacitive sensors

KW - MEMS

KW - noise

KW - pull-in

KW - readout

U2 - 10.1016/j.sna.2012.05.015

DO - 10.1016/j.sna.2012.05.015

M3 - Article

VL - 183

SP - 101

EP - 104

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

ER -