Noise suppression of MEMS readout near pull-in

Panu Helistö (Corresponding Author), Hannu Sipola, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)

    Fingerprint Dive into the research topics of 'Noise suppression of MEMS readout near pull-in'. Together they form a unique fingerprint.

    Physics & Astronomy

    Chemical Compounds

    Engineering & Materials Science