Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks

Nadine Guillaume, Markku Lahti, Michael Cresswell, Richard Allen, Loren Linholm, Mona Zaghloul

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	21st Annual BACUS Symposium on Photomask Technology
Publisher	International Society for Optics and Photonics SPIE
Pages	822-829
DOIs	https://doi.org/10.1117/12.458365
Publication status	Published - 2001
MoE publication type	B3 Non-refereed article in conference proceedings
Event	21st Annual BACUS Symposium on Photomask Technology - Monterey, United States Duration: 2 Oct 2001 → 5 Oct 2001

Conference	21st Annual BACUS Symposium on Photomask Technology
Country/Territory	United States
City	Monterey
Period	2/10/01 → 5/10/01

Access to Document

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title = "Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks",

author = "Nadine Guillaume and Markku Lahti and Michael Cresswell and Richard Allen and Loren Linholm and Mona Zaghloul",

year = "2001",

doi = "10.1117/12.458365",

language = "English",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

pages = "822--829",

booktitle = "21st Annual BACUS Symposium on Photomask Technology",

address = "United States",

note = "21st Annual BACUS Symposium on Photomask Technology ; Conference date: 02-10-2001 Through 05-10-2001",

}

Guillaume, N, Lahti, M, Cresswell, M, Allen, R, Linholm, L & Zaghloul, M 2001, Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks. in 21st Annual BACUS Symposium on Photomask Technology. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4562, pp. 822-829, 21st Annual BACUS Symposium on Photomask Technology, Monterey, California, United States, 2/10/01. https://doi.org/10.1117/12.458365

Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks. / Guillaume, Nadine; Lahti, Markku; Cresswell, Michael et al.
21st Annual BACUS Symposium on Photomask Technology. International Society for Optics and Photonics SPIE, 2001. p. 822-829 (Proceedings of SPIE, Vol. 4562).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks

AU - Guillaume, Nadine

AU - Lahti, Markku

AU - Cresswell, Michael

AU - Allen, Richard

AU - Linholm, Loren

AU - Zaghloul, Mona

PY - 2001

Y1 - 2001

U2 - 10.1117/12.458365

DO - 10.1117/12.458365

M3 - Conference article in proceedings

T3 - Proceedings of SPIE

SP - 822

EP - 829

BT - 21st Annual BACUS Symposium on Photomask Technology

PB - International Society for Optics and Photonics SPIE

T2 - 21st Annual BACUS Symposium on Photomask Technology

Y2 - 2 October 2001 through 5 October 2001

ER -