Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks

Nadine Guillaume, Markku Lahti, Michael Cresswell, Richard Allen, Loren Linholm, Mona Zaghloul

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Original languageEnglish
    Title of host publication21st Annual BACUS Symposium on Photomask Technology
    PublisherInternational Society for Optics and Photonics SPIE
    Pages822-829
    DOIs
    Publication statusPublished - 2001
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event21st Annual BACUS Symposium on Photomask Technology - Monterey, United States
    Duration: 2 Oct 20015 Oct 2001

    Publication series

    SeriesProceedings of SPIE
    Volume4562
    ISSN0277-786X

    Conference

    Conference21st Annual BACUS Symposium on Photomask Technology
    CountryUnited States
    CityMonterey
    Period2/10/015/10/01

    Cite this

    Guillaume, N., Lahti, M., Cresswell, M., Allen, R., Linholm, L., & Zaghloul, M. (2001). Non-Contact Electrical Critical Dimensions Metrology Sensor for Chrome Photomasks. In 21st Annual BACUS Symposium on Photomask Technology (pp. 822-829). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4562 https://doi.org/10.1117/12.458365