Non-destructive 3D measurement of microchannels

V. Heikkinen, A. Nolvi, I. Kassamakov, Kestutis Grigoras, S. Franssila, E Hæggström

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Microfluidic devices allow experimentation in smaller space using small amounts of liquid, resulting in improved reaction rates, cheaper equipment, reduced amount of expensive reagents. Very precise channel shape measurements are needed to assure the designed flow pattern. Several 3D imaging devices provide the necessary precision but typically they cannot image inside closed devices. Hence it is difficult to measure the shape of a microfluidic channel without destroying it. We fabricated and investigated samples with different microchannels. Several types of microfluidic channels were prepared in silicon wafer with a subsequent covering by bonding glass wafer on top. Microchannels in polymer have been done using epoxy-type photoresist SU-8. The internal geometry of the channels was measured using a Scanning White Light Interferometer (SWLI) equipped with optics that compensates for the effects of the top glass of the channels. The geometry of the interior of the channels can be measured with a precision similar to surface layer SWLI measurements without destroying the channels.
    Original languageEnglish
    Title of host publicationProceedings of SPIE 8466
    Subtitle of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
    EditorsMichael T. Postek
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-9183-1
    DOIs
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - San Diego, United States
    Duration: 13 Aug 201214 Aug 2012

    Publication series

    SeriesProceedings of SPIE
    Volume8466
    ISSN0277-786X

    Conference

    ConferenceInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
    CountryUnited States
    CitySan Diego
    Period13/08/1214/08/12

    Fingerprint

    microchannels
    interferometers
    wafers
    scanning
    glass
    microfluidic devices
    experimentation
    geometry
    photoresists
    reagents
    surface layers
    flow distribution
    reaction kinetics
    coverings
    optics
    polymers
    silicon
    liquids

    Keywords

    • microchannels
    • multilayer
    • scanning white light interferometry

    Cite this

    Heikkinen, V., Nolvi, A., Kassamakov, I., Grigoras, K., Franssila, S., & Hæggström, E. (2012). Non-destructive 3D measurement of microchannels. In M. T. Postek (Ed.), Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI [84660R] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8466 https://doi.org/10.1117/12.930080
    Heikkinen, V. ; Nolvi, A. ; Kassamakov, I. ; Grigoras, Kestutis ; Franssila, S. ; Hæggström, E. / Non-destructive 3D measurement of microchannels. Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. editor / Michael T. Postek. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8466).
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    title = "Non-destructive 3D measurement of microchannels",
    abstract = "Microfluidic devices allow experimentation in smaller space using small amounts of liquid, resulting in improved reaction rates, cheaper equipment, reduced amount of expensive reagents. Very precise channel shape measurements are needed to assure the designed flow pattern. Several 3D imaging devices provide the necessary precision but typically they cannot image inside closed devices. Hence it is difficult to measure the shape of a microfluidic channel without destroying it. We fabricated and investigated samples with different microchannels. Several types of microfluidic channels were prepared in silicon wafer with a subsequent covering by bonding glass wafer on top. Microchannels in polymer have been done using epoxy-type photoresist SU-8. The internal geometry of the channels was measured using a Scanning White Light Interferometer (SWLI) equipped with optics that compensates for the effects of the top glass of the channels. The geometry of the interior of the channels can be measured with a precision similar to surface layer SWLI measurements without destroying the channels.",
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    author = "V. Heikkinen and A. Nolvi and I. Kassamakov and Kestutis Grigoras and S. Franssila and E H{\ae}ggstr{\"o}m",
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    Heikkinen, V, Nolvi, A, Kassamakov, I, Grigoras, K, Franssila, S & Hæggström, E 2012, Non-destructive 3D measurement of microchannels. in MT Postek (ed.), Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI., 84660R, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8466, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, United States, 13/08/12. https://doi.org/10.1117/12.930080

    Non-destructive 3D measurement of microchannels. / Heikkinen, V.; Nolvi, A.; Kassamakov, I.; Grigoras, Kestutis; Franssila, S.; Hæggström, E.

    Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. ed. / Michael T. Postek. International Society for Optics and Photonics SPIE, 2012. 84660R (Proceedings of SPIE, Vol. 8466).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    Heikkinen V, Nolvi A, Kassamakov I, Grigoras K, Franssila S, Hæggström E. Non-destructive 3D measurement of microchannels. In Postek MT, editor, Proceedings of SPIE 8466: Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI. International Society for Optics and Photonics SPIE. 2012. 84660R. (Proceedings of SPIE, Vol. 8466). https://doi.org/10.1117/12.930080