Non-destructive 3D measurement of microchannels

V. Heikkinen, A. Nolvi, I. Kassamakov, Kestutis Grigoras, S. Franssila, E Hæggström

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review


    Microfluidic devices allow experimentation in smaller space using small amounts of liquid, resulting in improved reaction rates, cheaper equipment, reduced amount of expensive reagents. Very precise channel shape measurements are needed to assure the designed flow pattern. Several 3D imaging devices provide the necessary precision but typically they cannot image inside closed devices. Hence it is difficult to measure the shape of a microfluidic channel without destroying it. We fabricated and investigated samples with different microchannels. Several types of microfluidic channels were prepared in silicon wafer with a subsequent covering by bonding glass wafer on top. Microchannels in polymer have been done using epoxy-type photoresist SU-8. The internal geometry of the channels was measured using a Scanning White Light Interferometer (SWLI) equipped with optics that compensates for the effects of the top glass of the channels. The geometry of the interior of the channels can be measured with a precision similar to surface layer SWLI measurements without destroying the channels.
    Original languageEnglish
    Title of host publicationProceedings of SPIE 8466
    Subtitle of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
    EditorsMichael T. Postek
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-0-8194-9183-1
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - San Diego, United States
    Duration: 13 Aug 201214 Aug 2012

    Publication series

    SeriesProceedings of SPIE


    ConferenceInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
    Country/TerritoryUnited States
    CitySan Diego


    • microchannels
    • multilayer
    • scanning white light interferometry


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