@inproceedings{8689161da5f54158ae2a8126eeb12739,
title = "Non-destructive 3D measurement of microchannels",
abstract = "Microfluidic devices allow experimentation in smaller space using small amounts of liquid, resulting in improved reaction rates, cheaper equipment, reduced amount of expensive reagents. Very precise channel shape measurements are needed to assure the designed flow pattern. Several 3D imaging devices provide the necessary precision but typically they cannot image inside closed devices. Hence it is difficult to measure the shape of a microfluidic channel without destroying it. We fabricated and investigated samples with different microchannels. Several types of microfluidic channels were prepared in silicon wafer with a subsequent covering by bonding glass wafer on top. Microchannels in polymer have been done using epoxy-type photoresist SU-8. The internal geometry of the channels was measured using a Scanning White Light Interferometer (SWLI) equipped with optics that compensates for the effects of the top glass of the channels. The geometry of the interior of the channels can be measured with a precision similar to surface layer SWLI measurements without destroying the channels.",
keywords = "microchannels, multilayer, scanning white light interferometry",
author = "V. Heikkinen and A. Nolvi and I. Kassamakov and Kestutis Grigoras and S. Franssila and E H{\ae}ggstr{\"o}m",
year = "2012",
doi = "10.1117/12.930080",
language = "English",
isbn = "978-0-8194-9183-1",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
editor = "Postek, {Michael T.}",
booktitle = "Proceedings of SPIE 8466",
address = "United States",
note = "Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI ; Conference date: 13-08-2012 Through 14-08-2012",
}