Non-destructive 3D measurement of microchannels
- V. Heikkinen
- , A. Nolvi
- , I. Kassamakov
- , Kestutis Grigoras
- , S. Franssila
- , E Hæggström
- University of Helsinki
- Aalto University
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review