Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

  • Stefan Mertin
  • , Clemens Nyffeler
  • , Tapani Makkonen
  • , Bernd Heinz
  • , Andrea Mazzalai
  • , Thorsten Schmitz-Kempen
  • , Stephan Tiedke
  • , Tuomas Pensala
  • , Paul Muralt

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    12   Link opens in a new tab Citations (Scopus)

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