Non-destructive piezoelectric characterisation of Sc doped aluminium nitride thin films at wafer level

Stefan Mertin, Clemens Nyffeler, Tapani Makkonen, Bernd Heinz, Andrea Mazzalai, Thorsten Schmitz-Kempen, Stephan Tiedke, Tuomas Pensala, Paul Muralt

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)

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    Material Science