Non-Optical Lithography

Clivia M. Sotomayor Torres, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    Original languageEnglish
    Title of host publicationNanotechnology
    Subtitle of host publicationVolume 3: Information Technology I
    EditorsRainer Waser
    Place of PublicationWeinheim
    Pages209-238
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA3 Part of a book or another research book

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