Non-Optical Lithography

Clivia M. Sotomayor Torres, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    Original languageEnglish
    Title of host publicationNanotechnology
    Subtitle of host publicationVolume 3: Information Technology I
    EditorsRainer Waser
    Place of PublicationWeinheim
    Pages209-238
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA3 Part of a book or another research book

    Cite this

    Sotomayor Torres, C. M., & Ahopelto, J. (2008). Non-Optical Lithography. In R. Waser (Ed.), Nanotechnology: Volume 3: Information Technology I (pp. 209-238). https://doi.org/10.1002/9783527628155.nanotech026