Non-Optical Lithography

Clivia M. Sotomayor Torres, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

Original languageEnglish
Title of host publicationNanotechnology
Subtitle of host publicationVolume 3: Information Technology I
EditorsRainer Waser
Place of PublicationWeinheim
Pages209-238
DOIs
Publication statusPublished - 2008
MoE publication typeA3 Part of a book or another research book

Cite this

Sotomayor Torres, C. M., & Ahopelto, J. (2008). Non-Optical Lithography. In R. Waser (Ed.), Nanotechnology: Volume 3: Information Technology I (pp. 209-238). Weinheim. https://doi.org/10.1002/9783527628155.nanotech026
Sotomayor Torres, Clivia M. ; Ahopelto, Jouni. / Non-Optical Lithography. Nanotechnology: Volume 3: Information Technology I. editor / Rainer Waser. Weinheim, 2008. pp. 209-238
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Sotomayor Torres, CM & Ahopelto, J 2008, Non-Optical Lithography. in R Waser (ed.), Nanotechnology: Volume 3: Information Technology I. Weinheim, pp. 209-238. https://doi.org/10.1002/9783527628155.nanotech026

Non-Optical Lithography. / Sotomayor Torres, Clivia M.; Ahopelto, Jouni.

Nanotechnology: Volume 3: Information Technology I. ed. / Rainer Waser. Weinheim, 2008. p. 209-238.

Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

TY - CHAP

T1 - Non-Optical Lithography

AU - Sotomayor Torres, Clivia M.

AU - Ahopelto, Jouni

PY - 2008

Y1 - 2008

U2 - 10.1002/9783527628155.nanotech026

DO - 10.1002/9783527628155.nanotech026

M3 - Chapter or book article

SN - 978-3-527-31738-7

SP - 209

EP - 238

BT - Nanotechnology

A2 - Waser, Rainer

CY - Weinheim

ER -

Sotomayor Torres CM, Ahopelto J. Non-Optical Lithography. In Waser R, editor, Nanotechnology: Volume 3: Information Technology I. Weinheim. 2008. p. 209-238 https://doi.org/10.1002/9783527628155.nanotech026