Non-Optical Lithography

Clivia M. Sotomayor Torres, Jouni Ahopelto

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    Original languageEnglish
    Title of host publicationNanotechnology
    Subtitle of host publicationVolume 3: Information Technology I
    EditorsRainer Waser
    Place of PublicationWeinheim
    Pages209-238
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA3 Part of a book or another research book

    Cite this

    Sotomayor Torres, C. M., & Ahopelto, J. (2008). Non-Optical Lithography. In R. Waser (Ed.), Nanotechnology: Volume 3: Information Technology I (pp. 209-238). Weinheim. https://doi.org/10.1002/9783527628155.nanotech026
    Sotomayor Torres, Clivia M. ; Ahopelto, Jouni. / Non-Optical Lithography. Nanotechnology: Volume 3: Information Technology I. editor / Rainer Waser. Weinheim, 2008. pp. 209-238
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    year = "2008",
    doi = "10.1002/9783527628155.nanotech026",
    language = "English",
    isbn = "978-3-527-31738-7",
    pages = "209--238",
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    Sotomayor Torres, CM & Ahopelto, J 2008, Non-Optical Lithography. in R Waser (ed.), Nanotechnology: Volume 3: Information Technology I. Weinheim, pp. 209-238. https://doi.org/10.1002/9783527628155.nanotech026

    Non-Optical Lithography. / Sotomayor Torres, Clivia M.; Ahopelto, Jouni.

    Nanotechnology: Volume 3: Information Technology I. ed. / Rainer Waser. Weinheim, 2008. p. 209-238.

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    TY - CHAP

    T1 - Non-Optical Lithography

    AU - Sotomayor Torres, Clivia M.

    AU - Ahopelto, Jouni

    PY - 2008

    Y1 - 2008

    U2 - 10.1002/9783527628155.nanotech026

    DO - 10.1002/9783527628155.nanotech026

    M3 - Chapter or book article

    SN - 978-3-527-31738-7

    SP - 209

    EP - 238

    BT - Nanotechnology

    A2 - Waser, Rainer

    CY - Weinheim

    ER -

    Sotomayor Torres CM, Ahopelto J. Non-Optical Lithography. In Waser R, editor, Nanotechnology: Volume 3: Information Technology I. Weinheim. 2008. p. 209-238 https://doi.org/10.1002/9783527628155.nanotech026