Non-Optical Lithography

Clivia M. Sotomayor Torres, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review

Original language	English
Title of host publication	Nanotechnology
Subtitle of host publication	Volume 3: Information Technology I
Editors	Rainer Waser
Place of Publication	Weinheim
Publisher	Wiley-VCH Verlag
Pages	209-238
ISBN (Print)	978-3-527-31738-7
DOIs	https://doi.org/10.1002/9783527628155.nanotech026
Publication status	Published - 2008
MoE publication type	A3 Part of a book or another research book

Access to Document

@inbook{711e35dd462f4dfd9f82ca8416824a3f,

title = "Non-Optical Lithography",

author = "\{Sotomayor Torres\}, \{Clivia M.\} and Jouni Ahopelto",

year = "2008",

doi = "10.1002/9783527628155.nanotech026",

language = "English",

isbn = "978-3-527-31738-7",

pages = "209--238",

editor = "Rainer Waser",

booktitle = "Nanotechnology",

publisher = "Wiley-VCH Verlag",

address = "Germany",

}