Nondestructive inspection of buried channels and cavities in silicon
- Ivan Kassamakov
- , Kestutis Grigoras
- , Ville Heikkinen
- , Kalle Hanhijärvi
- , Juha Aaltonen
- , Sami Franssila
- , Edward Hæggström
- University of Helsinki
Research output: Contribution to journal › Article › Scientific › peer-review
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(Scopus)