Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, Kestutis Grigoras, I. Kassamakov, S. Franssilad, E. Hæggströma

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

Scanning White Light Interferometry (SWLI) provides high vertical precision for measuring step-like structures in microelectromechanical systems (MEMS). The SWLI performance depends on its light source. A rapidly modulated light source with a broad bandwidth inside the infrared (IR) region is necessary to measure layered MEMS that move. Typical SWLI light sources - light emitting diodes (LEDs) and Halogen (HG) bulbs - fulfill only one of these requirements. To overcome this shortcoming we equipped our SWLI setup with a supercontinuum (SC) light source produced by Fiberware Gmbh (Ilum 100 USB II). We tested our setup by measuring in plane and out of plane oscillating thermal bridges with visible light, as well as top and bottom surfaces of silicon structures using IR light. The wide SC spectrum creates localized interferograms. This allowed us to measure top and bottom surfaces of a thin (4 ?m) bridge. The stroboscopically measured profiles of oscillating thermal bridges were comparable to those measured using a white LED. The results of static measurements were similar to those achieved with an HG lamp
Original languageEnglish
Title of host publicationProceedings of SPIE 8250
Subtitle of host publicationReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-081948893-0
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - San Francisco, CA, United States
Duration: 23 Jan 201224 Jan 2012

Publication series

SeriesProceedings of SPIE
Volume8250
ISSN0277-786X

Conference

ConferenceReliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
CountryUnited States
CitySan Francisco, CA
Period23/01/1224/01/12

Fingerprint

microelectromechanical systems
interferometry
scanning
light sources
halogens
light emitting diodes
bulbs
luminaires
bandwidth
requirements
silicon
profiles

Keywords

  • Infrared
  • non destructive testing
  • Scanning White Light Interferometry
  • stroboscopic
  • supercontinuum

Cite this

Heikkinen, V., Hanhijärvi, K., Aaltonen, J., Grigoras, K., Kassamakov, I., Franssilad, S., & Hæggströma, E. (2012). Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. In Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X [825008] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8250 https://doi.org/10.1117/12.906178
Heikkinen, V. ; Hanhijärvi, K. ; Aaltonen, J. ; Grigoras, Kestutis ; Kassamakov, I. ; Franssilad, S. ; Hæggströma, E. / Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8250).
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abstract = "Scanning White Light Interferometry (SWLI) provides high vertical precision for measuring step-like structures in microelectromechanical systems (MEMS). The SWLI performance depends on its light source. A rapidly modulated light source with a broad bandwidth inside the infrared (IR) region is necessary to measure layered MEMS that move. Typical SWLI light sources - light emitting diodes (LEDs) and Halogen (HG) bulbs - fulfill only one of these requirements. To overcome this shortcoming we equipped our SWLI setup with a supercontinuum (SC) light source produced by Fiberware Gmbh (Ilum 100 USB II). We tested our setup by measuring in plane and out of plane oscillating thermal bridges with visible light, as well as top and bottom surfaces of silicon structures using IR light. The wide SC spectrum creates localized interferograms. This allowed us to measure top and bottom surfaces of a thin (4 ?m) bridge. The stroboscopically measured profiles of oscillating thermal bridges were comparable to those measured using a white LED. The results of static measurements were similar to those achieved with an HG lamp",
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Heikkinen, V, Hanhijärvi, K, Aaltonen, J, Grigoras, K, Kassamakov, I, Franssilad, S & Hæggströma, E 2012, Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. in Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X., 825008, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, United States, 23/01/12. https://doi.org/10.1117/12.906178

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. / Heikkinen, V.; Hanhijärvi, K.; Aaltonen, J.; Grigoras, Kestutis; Kassamakov, I.; Franssilad, S.; Hæggströma, E.

Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. International Society for Optics and Photonics SPIE, 2012. 825008 (Proceedings of SPIE, Vol. 8250).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Heikkinen V, Hanhijärvi K, Aaltonen J, Grigoras K, Kassamakov I, Franssilad S et al. Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry. In Proceedings of SPIE 8250 : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices X. International Society for Optics and Photonics SPIE. 2012. 825008. (Proceedings of SPIE, Vol. 8250). https://doi.org/10.1117/12.906178