Fingerprint Dive into the research topics of 'Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry
V. Heikkinen, K. Hanhijärvi, J. Aaltonen, Kestutis Grigoras, I. Kassamakov, S. Franssilad, E. Hæggströma
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
2
Citations
(Scopus)