Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, Kestutis Grigoras, I. Kassamakov, S. Franssilad, E. Hæggströma

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

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Physics & Astronomy