Nonlinear effects in solidly-mounted ZnO BAW resonators

Arto Nurmela, Hannu Salminen, Tomi Mattila, Markku Ylilammi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)


    The mechanical nonlinearity due to high power level in zinc oxide thin film bulk acoustic wave resonators has been studied in this work. The nonlinear behavior of these resonators was investigated using transmission response measurements. The resonator was decoupled from the 50 Ohm line impedance by 20 pF shunting capacitors in order to allow the excitation of high mechanical vibration levels at the series resonance frequency. The power levels ranged from +5 dBm to +29 dBm at the resonator input. At low excitation power (+5 dBm) the measured series and parallel resonance frequencies of the studied device were 941 MHz and 969 MHz, respectively. When increasing the excitation power level the transmission response exhibits a Duffing-behavior with tilting direction towards lower frequencies. The transmission shows a two-valued response starting at +15 dBm. (5 refs.)
    Original languageEnglish
    Title of host publicationProceedings
    Subtitle of host publicationIEEE International Ultrasonics Symposium, ULTSYM 2008
    Place of PublicationPiscataway, NJ, USA
    PublisherIEEE Institute of Electrical and Electronic Engineers
    ISBN (Print)978-1-4244-2428-3, 978-1-4244-2480-1
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    EventIEEE Ultrasonics Symposium - Beijing, China
    Duration: 2 Nov 20085 Nov 2008


    ConferenceIEEE Ultrasonics Symposium


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