Abstract
The mechanical nonlinearity due to high power level in
zinc oxide thin film bulk acoustic wave resonators has
been studied in this work. The nonlinear behavior of
these resonators was investigated using transmission
response measurements. The resonator was decoupled from
the 50 Ohm line impedance by 20 pF shunting capacitors in
order to allow the excitation of high mechanical
vibration levels at the series resonance frequency. The
power levels ranged from +5 dBm to +29 dBm at the
resonator input. At low excitation power (+5 dBm) the
measured series and parallel resonance frequencies of the
studied device were 941 MHz and 969 MHz, respectively.
When increasing the excitation power level the
transmission response exhibits a Duffing-behavior with
tilting direction towards lower frequencies. The
transmission shows a two-valued response starting at +15
dBm. (5 refs.)
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | IEEE International Ultrasonics Symposium, ULTSYM 2008 |
| Place of Publication | Piscataway, NJ, USA |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 1561-1563 |
| ISBN (Print) | 978-1-4244-2428-3, 978-1-4244-2480-1 |
| DOIs | |
| Publication status | Published - 2008 |
| MoE publication type | A4 Article in a conference publication |
| Event | IEEE Ultrasonics Symposium - Beijing, China Duration: 2 Nov 2008 → 5 Nov 2008 |
Conference
| Conference | IEEE Ultrasonics Symposium |
|---|---|
| Country/Territory | China |
| City | Beijing |
| Period | 2/11/08 → 5/11/08 |