Abstract
Nonlinear properties of piezoelectric materials become
important when thin-film piezoresonators (thin-film bulk
acoustic wave BAW) are employed in the duplexers of
mobile phones. In this application the high output power
of the transmitter is connected to the input of the
receiver filter. Harmonics generation and intermodulation
distortion are the main harmful nonlinear effects.
Although the nonlinear effects have been studied in
silicon BAW MEMS resonators working at 13 MHz, the
available literature on nonlinear effects in GHz-range
BAWs is scarce. In this work we have studied the
nonlinearity of solidly-mounted ZnO thin-film BAW
resonators.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland |
| Place of Publication | Espoo |
| Publication status | Published - 2009 |
| MoE publication type | B3 Non-refereed article in conference proceedings |
| Event | XLIII Annual Conference of the Finnish Physical Society - Espoo, Finland Duration: 12 Mar 2009 → 14 Mar 2009 |
Conference
| Conference | XLIII Annual Conference of the Finnish Physical Society |
|---|---|
| Country/Territory | Finland |
| City | Espoo |
| Period | 12/03/09 → 14/03/09 |
Keywords
- thin film BAW
- nonlinearity
- harmonics
- intermodulation distortion
- bifurcation