Nonlinear effects in ZnO thin film bulk acoustic wave resonator

Arto Nurmela, Hannu Salminen, Tomi Mattila, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Abstract

Nonlinear properties of piezoelectric materials become important when thin-film piezoresonators (thin-film bulk acoustic wave BAW) are employed in the duplexers of mobile phones. In this application the high output power of the transmitter is connected to the input of the receiver filter. Harmonics generation and intermodulation distortion are the main harmful nonlinear effects. Although the nonlinear effects have been studied in silicon BAW MEMS resonators working at 13 MHz, the available literature on nonlinear effects in GHz-range BAWs is scarce. In this work we have studied the nonlinearity of solidly-mounted ZnO thin-film BAW resonators.
Original languageEnglish
Title of host publicationProceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland
Place of PublicationEspoo
Publication statusPublished - 2009
MoE publication typeB3 Non-refereed article in conference proceedings
EventXLIII Annual Conference of the Finnish Physical Society - Espoo, Finland
Duration: 12 Mar 200914 Mar 2009

Conference

ConferenceXLIII Annual Conference of the Finnish Physical Society
CountryFinland
CityEspoo
Period12/03/0914/03/09

Fingerprint

resonators
acoustics
duplexers
thin films
intermodulation
transmitters
microelectromechanical systems
harmonic generations
receivers
nonlinearity
filters
output
silicon

Keywords

  • thin film BAW
  • nonlinearity
  • harmonics
  • intermodulation distortion
  • bifurcation

Cite this

Nurmela, A., Salminen, H., Mattila, T., & Ylilammi, M. (2009). Nonlinear effects in ZnO thin film bulk acoustic wave resonator. In Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland Espoo.
Nurmela, Arto ; Salminen, Hannu ; Mattila, Tomi ; Ylilammi, Markku. / Nonlinear effects in ZnO thin film bulk acoustic wave resonator. Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland. Espoo, 2009.
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abstract = "Nonlinear properties of piezoelectric materials become important when thin-film piezoresonators (thin-film bulk acoustic wave BAW) are employed in the duplexers of mobile phones. In this application the high output power of the transmitter is connected to the input of the receiver filter. Harmonics generation and intermodulation distortion are the main harmful nonlinear effects. Although the nonlinear effects have been studied in silicon BAW MEMS resonators working at 13 MHz, the available literature on nonlinear effects in GHz-range BAWs is scarce. In this work we have studied the nonlinearity of solidly-mounted ZnO thin-film BAW resonators.",
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Nurmela, A, Salminen, H, Mattila, T & Ylilammi, M 2009, Nonlinear effects in ZnO thin film bulk acoustic wave resonator. in Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland. Espoo, XLIII Annual Conference of the Finnish Physical Society, Espoo, Finland, 12/03/09.

Nonlinear effects in ZnO thin film bulk acoustic wave resonator. / Nurmela, Arto; Salminen, Hannu; Mattila, Tomi; Ylilammi, Markku.

Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland. Espoo, 2009.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - Nonlinear effects in ZnO thin film bulk acoustic wave resonator

AU - Nurmela, Arto

AU - Salminen, Hannu

AU - Mattila, Tomi

AU - Ylilammi, Markku

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N2 - Nonlinear properties of piezoelectric materials become important when thin-film piezoresonators (thin-film bulk acoustic wave BAW) are employed in the duplexers of mobile phones. In this application the high output power of the transmitter is connected to the input of the receiver filter. Harmonics generation and intermodulation distortion are the main harmful nonlinear effects. Although the nonlinear effects have been studied in silicon BAW MEMS resonators working at 13 MHz, the available literature on nonlinear effects in GHz-range BAWs is scarce. In this work we have studied the nonlinearity of solidly-mounted ZnO thin-film BAW resonators.

AB - Nonlinear properties of piezoelectric materials become important when thin-film piezoresonators (thin-film bulk acoustic wave BAW) are employed in the duplexers of mobile phones. In this application the high output power of the transmitter is connected to the input of the receiver filter. Harmonics generation and intermodulation distortion are the main harmful nonlinear effects. Although the nonlinear effects have been studied in silicon BAW MEMS resonators working at 13 MHz, the available literature on nonlinear effects in GHz-range BAWs is scarce. In this work we have studied the nonlinearity of solidly-mounted ZnO thin-film BAW resonators.

KW - thin film BAW

KW - nonlinearity

KW - harmonics

KW - intermodulation distortion

KW - bifurcation

M3 - Conference article in proceedings

SN - 978-951-22-9793-1

BT - Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland

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Nurmela A, Salminen H, Mattila T, Ylilammi M. Nonlinear effects in ZnO thin film bulk acoustic wave resonator. In Proceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland. Espoo. 2009