Nonlinear effects in ZnO thin film bulk acoustic wave resonator

Arto Nurmela, Hannu Salminen, Tomi Mattila, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific


Nonlinear properties of piezoelectric materials become important when thin-film piezoresonators (thin-film bulk acoustic wave BAW) are employed in the duplexers of mobile phones. In this application the high output power of the transmitter is connected to the input of the receiver filter. Harmonics generation and intermodulation distortion are the main harmful nonlinear effects. Although the nonlinear effects have been studied in silicon BAW MEMS resonators working at 13 MHz, the available literature on nonlinear effects in GHz-range BAWs is scarce. In this work we have studied the nonlinearity of solidly-mounted ZnO thin-film BAW resonators.
Original languageEnglish
Title of host publicationProceedings of the XLIII annual conference of the Finnish Physical Society, March 12th-14th, 2009, Espoo, Finland
Place of PublicationEspoo
Publication statusPublished - 2009
MoE publication typeB3 Non-refereed article in conference proceedings
EventXLIII Annual Conference of the Finnish Physical Society - Espoo, Finland
Duration: 12 Mar 200914 Mar 2009


ConferenceXLIII Annual Conference of the Finnish Physical Society


  • thin film BAW
  • nonlinearity
  • harmonics
  • intermodulation distortion
  • bifurcation

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