Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

Lauri Lipiäinen, Antti Jaakkola, Kimmo Kokkonen, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Abstract

We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanical resonator, actuated with a piezoelectric AlN thin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured ∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.
Original languageEnglish
Article number153508
JournalApplied Physics Letters
Volume100
Issue number15
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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resonators
excitation
vibration
sound waves
vibration mode
nonlinearity
low frequencies
saturation
thin films
lasers

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Lipiäinen, Lauri ; Jaakkola, Antti ; Kokkonen, Kimmo ; Kaivola, Matti. / Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. In: Applied Physics Letters. 2012 ; Vol. 100, No. 15.
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Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. / Lipiäinen, Lauri; Jaakkola, Antti; Kokkonen, Kimmo; Kaivola, Matti.

In: Applied Physics Letters, Vol. 100, No. 15, 153508, 2012.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

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AU - Jaakkola, Antti

AU - Kokkonen, Kimmo

AU - Kaivola, Matti

PY - 2012

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N2 - We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanical resonator, actuated with a piezoelectric AlN thin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured ∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.

AB - We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanical resonator, actuated with a piezoelectric AlN thin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured ∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant.

U2 - 10.1063/1.3703119

DO - 10.1063/1.3703119

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JO - Applied Physics Letters

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