Nonlinear limits for single-crystal silicon microresonators

Ville Kaajakari, Tomi Mattila, Aarne Oja, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

274 Citations (Scopus)

Abstract

Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have orders-of-magnitude higher energy storage capability than flexural beam resonators. The bifurcation point for the silicon BAW resonators is measured and the maximum vibration amplitude is shown to approach the intrinsic material limit. The importance of nonlinearities in setting the limit for vibration energy storage is demonstrated in oscillator applications. The phase noise calculated for silicon microresonator-based oscillators is compared to the conventional macroscopic quartz-based oscillators, and it is shown that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size. Scaling law for microresonator phase noise is developed.
Original languageEnglish
Pages (from-to)715 - 724
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume13
Issue number5
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

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Resonators
Single crystals
Silicon
Phase noise
Energy storage
Acoustic waves
Scaling laws
Vibrations (mechanical)
Quartz

Keywords

  • micromechanical oscillators

Cite this

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title = "Nonlinear limits for single-crystal silicon microresonators",
abstract = "Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have orders-of-magnitude higher energy storage capability than flexural beam resonators. The bifurcation point for the silicon BAW resonators is measured and the maximum vibration amplitude is shown to approach the intrinsic material limit. The importance of nonlinearities in setting the limit for vibration energy storage is demonstrated in oscillator applications. The phase noise calculated for silicon microresonator-based oscillators is compared to the conventional macroscopic quartz-based oscillators, and it is shown that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size. Scaling law for microresonator phase noise is developed.",
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Nonlinear limits for single-crystal silicon microresonators. / Kaajakari, Ville; Mattila, Tomi; Oja, Aarne; Seppä, Heikki.

In: Journal of Microelectromechanical Systems, Vol. 13, No. 5, 2004, p. 715 - 724.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Nonlinear limits for single-crystal silicon microresonators

AU - Kaajakari, Ville

AU - Mattila, Tomi

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have orders-of-magnitude higher energy storage capability than flexural beam resonators. The bifurcation point for the silicon BAW resonators is measured and the maximum vibration amplitude is shown to approach the intrinsic material limit. The importance of nonlinearities in setting the limit for vibration energy storage is demonstrated in oscillator applications. The phase noise calculated for silicon microresonator-based oscillators is compared to the conventional macroscopic quartz-based oscillators, and it is shown that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size. Scaling law for microresonator phase noise is developed.

AB - Nonlinear effects in single-crystal silicon microresonators are analyzed with the focus on mechanical nonlinearities. The bulk acoustic wave (BAW) resonators are shown to have orders-of-magnitude higher energy storage capability than flexural beam resonators. The bifurcation point for the silicon BAW resonators is measured and the maximum vibration amplitude is shown to approach the intrinsic material limit. The importance of nonlinearities in setting the limit for vibration energy storage is demonstrated in oscillator applications. The phase noise calculated for silicon microresonator-based oscillators is compared to the conventional macroscopic quartz-based oscillators, and it is shown that the higher energy density attainable with the silicon resonators can partially compensate for the small microresonator size. Scaling law for microresonator phase noise is developed.

KW - micromechanical oscillators

U2 - 10.1109/JMEMS.2004.835771

DO - 10.1109/JMEMS.2004.835771

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EP - 724

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

ER -