Nonlinear mechanical effects in silicon longitudinal mode beam resonators

Ville Kaajakari (Corresponding Author), Tomi Mattila, Antti Lipsanen, Aarne Oja

Research output: Contribution to journalArticleScientificpeer-review

78 Citations (Scopus)

Abstract

The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor (Q > 100 000). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1 1 0] direction than for beams in [1 0 0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators.
Original languageEnglish
Pages (from-to)64 - 70
Number of pages7
JournalSensors and Actuators A: Physical
Volume120
Issue number1
DOIs
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Fingerprint

Silicon
Resonators
resonators
silicon
Single crystals
single crystals
Q factors
Analytical models
modulus of elasticity
Elastic moduli
nonlinearity
engineering
Crystalline materials
Geometry
geometry
predictions
Direction compound

Keywords

  • bulk acoustic wave devices
  • hysteresis
  • nonlinearities
  • microresonators
  • nonlinear oscillators
  • micromechanical oscillators
  • microelectromechanical resonators
  • resonators

Cite this

Kaajakari, Ville ; Mattila, Tomi ; Lipsanen, Antti ; Oja, Aarne. / Nonlinear mechanical effects in silicon longitudinal mode beam resonators. In: Sensors and Actuators A: Physical. 2005 ; Vol. 120, No. 1. pp. 64 - 70.
@article{8f90363d2aac4daf8e14cf37a1ba1c98,
title = "Nonlinear mechanical effects in silicon longitudinal mode beam resonators",
abstract = "The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor (Q > 100 000). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1 1 0] direction than for beams in [1 0 0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators.",
keywords = "bulk acoustic wave devices, hysteresis, nonlinearities, microresonators, nonlinear oscillators, micromechanical oscillators, microelectromechanical resonators, resonators",
author = "Ville Kaajakari and Tomi Mattila and Antti Lipsanen and Aarne Oja",
year = "2005",
doi = "10.1016/j.sna.2004.11.010",
language = "English",
volume = "120",
pages = "64 -- 70",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

Nonlinear mechanical effects in silicon longitudinal mode beam resonators. / Kaajakari, Ville (Corresponding Author); Mattila, Tomi; Lipsanen, Antti; Oja, Aarne.

In: Sensors and Actuators A: Physical, Vol. 120, No. 1, 2005, p. 64 - 70.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Nonlinear mechanical effects in silicon longitudinal mode beam resonators

AU - Kaajakari, Ville

AU - Mattila, Tomi

AU - Lipsanen, Antti

AU - Oja, Aarne

PY - 2005

Y1 - 2005

N2 - The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor (Q > 100 000). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1 1 0] direction than for beams in [1 0 0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators.

AB - The fundamental nonlinear mechanical effects in micromachined single-crystal silicon resonators are investigated. Longitudinal mode beam resonators are chosen for the analysis due to their simple geometry and high quality factor (Q > 100 000). Analytical model for the resonator is developed in terms of nonlinear engineering Young’s modulus that incorporates both geometrical and material effects. For comparison with the theory, beam resonators were fabricated in two different crystalline directions. The measured nonlinearity is larger for beams in [1 1 0] direction than for beams in [1 0 0] direction in agreement with the theoretical prediction. The results provide a quantitative value for the appearance of the material-induced nonlinear effects in single-crystal silicon microresonators.

KW - bulk acoustic wave devices

KW - hysteresis

KW - nonlinearities

KW - microresonators

KW - nonlinear oscillators

KW - micromechanical oscillators

KW - microelectromechanical resonators

KW - resonators

U2 - 10.1016/j.sna.2004.11.010

DO - 10.1016/j.sna.2004.11.010

M3 - Article

VL - 120

SP - 64

EP - 70

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 1

ER -