Nonlinearities in single-crystal silicon micromechanical resonators

Ville Kaajakari, Tomi Mattila, Jyrki Kiihamäki, Hannu Kattelus, Aarne Oja, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

19 Citations (Scopus)

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Physics & Astronomy