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Nonlinearities in single-crystal silicon micromechanical resonators
Ville Kaajakari, Tomi Mattila, Jyrki Kiihamäki, Hannu Kattelus, Aarne Oja, Heikki Seppä
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
19
Citations
(Scopus)