Nonlinearities in single-crystal silicon micromechanical resonators
- Ville Kaajakari
- , Tomi Mattila
- , Jyrki Kiihamäki
- , Hannu Kattelus
- , Aarne Oja
- , Heikki Seppä
- Helsinki University of Technology
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
20
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(Scopus)