Novel microelectromechanical references for electric metrology

Jukka Kyynäräinen, Aarne Oja, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems
    EditorsR.F. Wolffenbuttel, D.D.L. Wijngaards, C.J. van Mullem
    PublisherDelft Technical University
    Pages31-39
    ISBN (Print)978-90-9014-166-4
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventSymposium on Microtechnology in Metrology and Metrology in Microsystems - Delft, Netherlands
    Duration: 31 Aug 20001 Sep 2000

    Conference

    ConferenceSymposium on Microtechnology in Metrology and Metrology in Microsystems
    Country/TerritoryNetherlands
    CityDelft
    Period31/08/001/09/00

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