Novel microelectromechanical references for electric metrology

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems
    Subtitle of host publication31 August-1 September 2000, Delft, the Netherlands
    EditorsR.F. Wolffenbuttel, D.D.L. Wijngaards, C.J. van Mullem
    PublisherDelft Technical University
    Pages31-39
    ISBN (Print)90-9014-166-9
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

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