Novel microelectromechanical references for electric metrology

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems
    Subtitle of host publication31 August-1 September 2000, Delft, the Netherlands
    EditorsR.F. Wolffenbuttel, D.D.L. Wijngaards, C.J. van Mullem
    PublisherDelft Technical University
    Pages31-39
    ISBN (Print)90-9014-166-9
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Cite this

    Kyynäräinen, J., Oja, A., & Seppä, H. (2000). Novel microelectromechanical references for electric metrology. In R. F. Wolffenbuttel, D. D. L. Wijngaards, & C. J. van Mullem (Eds.), Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems: 31 August-1 September 2000, Delft, the Netherlands (pp. 31-39). Delft Technical University. http://www.vtt.fi/inf/julkaisut/muut/2000/delft.pdf