Novel microelectromechanical references for electric metrology

Jukka Kyynäräinen, Aarne Oja, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems
Editors	R.F. Wolffenbuttel, D.D.L. Wijngaards, C.J. van Mullem
Publisher	Delft Technical University
Pages	31-39
ISBN (Print)	978-90-9014-166-4
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication
Event	Symposium on Microtechnology in Metrology and Metrology in Microsystems - Delft, Netherlands Duration: 31 Aug 2000 → 1 Sept 2000

Conference	Symposium on Microtechnology in Metrology and Metrology in Microsystems
Country/Territory	Netherlands
City	Delft
Period	31/08/00 → 1/09/00

Access to Document

Kyynäräinen, J., Oja, A., & Seppä, H. (2000). Novel microelectromechanical references for electric metrology. In R. F. Wolffenbuttel, D. D. L. Wijngaards, & C. J. van Mullem (Eds.), Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems (pp. 31-39). Delft Technical University. https://publications.vtt.fi/julkaisut/muut/2000/delft.pdf

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author = "Jukka Kyyn{\"a}r{\"a}inen and Aarne Oja and Heikki Sepp{\"a}",

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editor = "R.F. Wolffenbuttel and D.D.L. Wijngaards and {van Mullem}, C.J.",

booktitle = "Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems",

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Kyynäräinen, J, Oja, A & Seppä, H 2000, Novel microelectromechanical references for electric metrology. in RF Wolffenbuttel, DDL Wijngaards & CJ van Mullem (eds), Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems. Delft Technical University, pp. 31-39, Symposium on Microtechnology in Metrology and Metrology in Microsystems, Delft, Netherlands, 31/08/00. <https://publications.vtt.fi/julkaisut/muut/2000/delft.pdf>

Novel microelectromechanical references for electric metrology. / Kyynäräinen, Jukka; Oja, Aarne; Seppä, Heikki.
Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems. ed. / R.F. Wolffenbuttel; D.D.L. Wijngaards; C.J. van Mullem. Delft Technical University, 2000. p. 31-39.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Novel microelectromechanical references for electric metrology

AU - Kyynäräinen, Jukka

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SN - 978-90-9014-166-4

SP - 31

EP - 39

BT - Proceedings of the Symposium on Microtechnology in Metrology and Metrology in Microsystems

A2 - Wolffenbuttel, R.F.

A2 - Wijngaards, D.D.L.

A2 - van Mullem, C.J.

PB - Delft Technical University

T2 - Symposium on Microtechnology in Metrology and Metrology in Microsystems

Y2 - 31 August 2000 through 1 September 2000

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