Novel micromechanical device

Jyrki Kiihamäki; Tuomas Pensala; Antti Jaakkola; Maria Ganchenkova; Mika Prunnila

Novel micromechanical device

Jyrki Kiihamäki (Inventor), Tuomas Pensala (Inventor), Antti Jaakkola (Inventor), Maria Ganchenkova (Inventor), Mika Prunnila (Inventor)

Research output: Patent › Patent

Abstract

The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.

Patent family as of 27.9.2021
CN103444079 A 20131211 CN201280009253 20120217
CN103444079 B 20170531 CN201280009253 20120217
DE602012073503 D1 20201217 DE201260073503T 20120217
EP2676366 A1 20131225 EP20120747759 20120217
EP2676366 A4 20140806 EP20120747759 20120217
EP2676366 B1 20201202 EP20120747759 20120217
FI126586 B 20170228 FI20110005151 20110217
FI20115151 A 20120818 FI20110005151 20110217
FI20115151 A0 20110217 FI20110005151 20110217
JP2014507096 T2 20140320 JP20130553977T 20120217
JP6109752 B2 20170405 JP20130553977T 20120217
KR101724661 B1 20170418 KR20137024650 20120217
KR20140021571 A 20140220 KR20137024650 20120217
US2014077898 AA 20140320 US20120985876 20120217
US9559660 BB 20170131 US20120985876 20120217
WO12110708 A1 20120823 WO2012FI50157 20120217

Link to current patent family on right

Original language	English
Patent number	EP2676366
IPC	H03H 9/ 24 A N
Priority date	17/02/12
Publication status	Published - 25 Dec 2013
MoE publication type	H1 Granted patent

Cite this

@misc{882c39d44a54401abe2881c37e686671,

title = "Novel micromechanical device",

abstract = "The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.Patent family as of 27.9.2021CN103444079 A 20131211 CN201280009253 20120217 CN103444079 B 20170531 CN201280009253 20120217 DE602012073503 D1 20201217 DE201260073503T 20120217 EP2676366 A1 20131225 EP20120747759 20120217 EP2676366 A4 20140806 EP20120747759 20120217 EP2676366 B1 20201202 EP20120747759 20120217 FI126586 B 20170228 FI20110005151 20110217 FI20115151 A 20120818 FI20110005151 20110217 FI20115151 A0 20110217 FI20110005151 20110217 JP2014507096 T2 20140320 JP20130553977T 20120217 JP6109752 B2 20170405 JP20130553977T 20120217 KR101724661 B1 20170418 KR20137024650 20120217 KR20140021571 A 20140220 KR20137024650 20120217 US2014077898 AA 20140320 US20120985876 20120217 US9559660 BB 20170131 US20120985876 20120217 WO12110708 A1 20120823 WO2012FI50157 20120217Link to current patent family on right ",

author = "Jyrki Kiiham{\"a}ki and Tuomas Pensala and Antti Jaakkola and Maria Ganchenkova and Mika Prunnila",

year = "2013",

month = dec,

day = "25",

language = "English",

type = "Patent",

note = "EP2676366; H03H 9/ 24 A N",

}

TY - PAT

T1 - Novel micromechanical device

AU - Kiihamäki, Jyrki

AU - Pensala, Tuomas

AU - Jaakkola, Antti

AU - Ganchenkova, Maria

AU - Prunnila, Mika

PY - 2013/12/25

Y1 - 2013/12/25

N2 - The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.Patent family as of 27.9.2021CN103444079 A 20131211 CN201280009253 20120217 CN103444079 B 20170531 CN201280009253 20120217 DE602012073503 D1 20201217 DE201260073503T 20120217 EP2676366 A1 20131225 EP20120747759 20120217 EP2676366 A4 20140806 EP20120747759 20120217 EP2676366 B1 20201202 EP20120747759 20120217 FI126586 B 20170228 FI20110005151 20110217 FI20115151 A 20120818 FI20110005151 20110217 FI20115151 A0 20110217 FI20110005151 20110217 JP2014507096 T2 20140320 JP20130553977T 20120217 JP6109752 B2 20170405 JP20130553977T 20120217 KR101724661 B1 20170418 KR20137024650 20120217 KR20140021571 A 20140220 KR20137024650 20120217 US2014077898 AA 20140320 US20120985876 20120217 US9559660 BB 20170131 US20120985876 20120217 WO12110708 A1 20120823 WO2012FI50157 20120217Link to current patent family on right

AB - The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.Patent family as of 27.9.2021CN103444079 A 20131211 CN201280009253 20120217 CN103444079 B 20170531 CN201280009253 20120217 DE602012073503 D1 20201217 DE201260073503T 20120217 EP2676366 A1 20131225 EP20120747759 20120217 EP2676366 A4 20140806 EP20120747759 20120217 EP2676366 B1 20201202 EP20120747759 20120217 FI126586 B 20170228 FI20110005151 20110217 FI20115151 A 20120818 FI20110005151 20110217 FI20115151 A0 20110217 FI20110005151 20110217 JP2014507096 T2 20140320 JP20130553977T 20120217 JP6109752 B2 20170405 JP20130553977T 20120217 KR101724661 B1 20170418 KR20137024650 20120217 KR20140021571 A 20140220 KR20137024650 20120217 US2014077898 AA 20140320 US20120985876 20120217 US9559660 BB 20170131 US20120985876 20120217 WO12110708 A1 20120823 WO2012FI50157 20120217Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/043629823/publication/EP2676366A1?q=EP2676366

M3 - Patent

M1 - EP2676366

ER -

Novel micromechanical device

Abstract

Other files and links

Fingerprint

Cite this