Novel micromechanical device

Jyrki Kiihamäki (Inventor), Tuomas Pensala (Inventor), Antti Jaakkola (Inventor), Maria Ganchenkova (Inventor), Mika Prunnila (Inventor)

Research output: PatentPatent


The invention concerns a micromechanical device and method of manufacturing thereof. The device comprises an oscillating or deflecting element made of semiconductor material comprising n-type doping agent and excitation or sensing means functionally connected to said oscillating or deflecting element. According to the invention, the oscillating or deflecting element is essentially homogeneously doped with said n-type doping agent. The invention allows for designing a variety of practical resonators having a low temperature drift.

Patent family as of 27.9.2021
CN103444079 A 20131211 CN201280009253 20120217      
CN103444079 B 20170531 CN201280009253 20120217      
DE602012073503 D1 20201217 DE201260073503T 20120217      
EP2676366 A1 20131225 EP20120747759 20120217      
EP2676366 A4 20140806 EP20120747759 20120217      
EP2676366 B1 20201202 EP20120747759 20120217      
FI126586 B 20170228 FI20110005151 20110217      
FI20115151 A 20120818 FI20110005151 20110217      
FI20115151 A0 20110217 FI20110005151 20110217      
JP2014507096 T2 20140320 JP20130553977T 20120217      
JP6109752 B2 20170405 JP20130553977T 20120217      
KR101724661 B1 20170418 KR20137024650 20120217      
KR20140021571 A 20140220 KR20137024650 20120217      
US2014077898 AA 20140320 US20120985876 20120217      
US9559660 BB 20170131 US20120985876 20120217      
WO12110708 A1 20120823 WO2012FI50157 20120217

Link to current patent family on right 

Original languageEnglish
Patent numberEP2676366
IPCH03H 9/ 24 A N
Priority date17/02/12
Publication statusPublished - 25 Dec 2013
MoE publication typeH1 Granted patent


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