Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate

C.-Y. Lo; Johanna Hiitola-Keinänen; Olli-Heikki Huttunen; Jarno Petäjä; Jukka Hast; Arto Maaninen; Harri Kopola; H. Fujita; H. Toshiyoshi

doi:10.1016/j.mee.2009.02.001

Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate

C.-Y. Lo (Corresponding Author), Johanna Hiitola-Keinänen, Olli-Heikki Huttunen, Jarno Petäjä, Jukka Hast, Arto Maaninen, Harri Kopola, H. Fujita, H. Toshiyoshi

University of Tokyo

Research output: Contribution to journal › Article › Scientific › peer-review

39 Citations (Scopus)

Abstract

A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 μm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 μm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate’s patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate.

Original language	English
Pages (from-to)	979-983
Number of pages	5
Journal	Microelectronic Engineering
Volume	86
Issue number	4-6
DOIs	https://doi.org/10.1016/j.mee.2009.02.001
Publication status	Published - 2009
MoE publication type	A1 Journal article-refereed

Keywords

Fabry-Perot
Flexible display
MEMS
Roll-to-roll

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10.1016/j.mee.2009.02.001

Cite this

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title = "Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate",

abstract = "A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 μm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 μm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate{\textquoteright}s patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate.",

keywords = "Fabry-Perot, Flexible display, MEMS, Roll-to-roll",

author = "C.-Y. Lo and Johanna Hiitola-Kein{\"a}nen and Olli-Heikki Huttunen and Jarno Pet{\"a}j{\"a} and Jukka Hast and Arto Maaninen and Harri Kopola and H. Fujita and H. Toshiyoshi",

year = "2009",

doi = "10.1016/j.mee.2009.02.001",

language = "English",

volume = "86",

pages = "979--983",

journal = "Microelectronic Engineering",

issn = "0167-9317",

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TY - JOUR

T1 - Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate

AU - Lo, C.-Y.

AU - Hiitola-Keinänen, Johanna

AU - Huttunen, Olli-Heikki

AU - Petäjä, Jarno

AU - Hast, Jukka

AU - Maaninen, Arto

AU - Kopola, Harri

AU - Fujita, H.

AU - Toshiyoshi, H.

PY - 2009

Y1 - 2009

N2 - A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 μm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 μm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate’s patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate.

AB - A novel electrode patterning technique by using lift-off a sacrificial black ink layer on thin polymer substrate was performed on a roll-to-roll (reel-to-reel, R2R) printing system. An active-matrix display array was demonstrated by this technique with 2000 μm display pixels with concept of MEMS (micro electro mechanical system) etalon. The resolution of this flexography lift-off system was improved to 100 μm for pattern isolation from gravure printing. Compare to well-developed hot embossing or laser ablation for polymer substrate’s patterning, R2R lift-off provides a flat and smooth surface which is a must for multilayer stacking and reliability. This system also provides a high pattern integrity, low cost, large scale, and high throughput solution for electrode patterning on flexible polymer substrate.

KW - Fabry-Perot

KW - Flexible display

KW - MEMS

KW - Roll-to-roll

U2 - 10.1016/j.mee.2009.02.001

DO - 10.1016/j.mee.2009.02.001

M3 - Article

SN - 0167-9317

VL - 86

SP - 979

EP - 983

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 4-6

ER -

Novel roll-to-roll lift-off patterned active-matrix display on flexible polymer substrate

Abstract

Keywords

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