The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing
|Publication status||Published - 2012|
|MoE publication type||Not Eligible|
|Event||BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012 - Dalian, China|
Duration: 28 Aug 2012 → 30 Aug 2012
|Conference||BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012|
|Period||28/08/12 → 30/08/12|
Kattelus, H., Blomberg, M., Rissanen, A., & Puurunen, R. (2012). Novel Spectrometers Based on MEMS Fabry-Pérot Technology. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.