Novel Spectrometers Based on MEMS Fabry-Pérot Technology

Hannu Kattelus, Martti Blomberg, Anna Rissanen, Riikka Puurunen

    Research output: Contribution to conferenceOther conference contributionScientific

    Abstract

    The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing
    Original languageEnglish
    Publication statusPublished - 2012
    MoE publication typeNot Eligible
    EventBIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012 - Dalian, China
    Duration: 28 Aug 201230 Aug 2012

    Conference

    ConferenceBIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012
    Abbreviated titleWCEIT2012
    CountryChina
    CityDalian
    Period28/08/1230/08/12

    Keywords

    • MEMS
    • Fabry-Pérot
    • spectrometers

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  • Cite this

    Kattelus, H., Blomberg, M., Rissanen, A., & Puurunen, R. (2012). Novel Spectrometers Based on MEMS Fabry-Pérot Technology. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.