Novel Spectrometers Based on MEMS Fabry-Pérot Technology

Hannu Kattelus, Martti Blomberg, Anna Rissanen, Riikka Puurunen

Research output: Contribution to conferenceOther conference contributionScientific

Abstract

The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing
Original languageEnglish
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventBIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012 - Dalian, China
Duration: 28 Aug 201230 Aug 2012

Conference

ConferenceBIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012
Abbreviated titleWCEIT2012
CountryChina
CityDalian
Period28/08/1230/08/12

Fingerprint

microelectromechanical systems
optical filters
spectrometers
gyroscopes
accelerometers
microphones
integrated circuits
emerging
ultrasonics
detectors
silicon
electronics

Keywords

  • MEMS
  • Fabry-Pérot
  • spectrometers

Cite this

Kattelus, H., Blomberg, M., Rissanen, A., & Puurunen, R. (2012). Novel Spectrometers Based on MEMS Fabry-Pérot Technology. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.
Kattelus, Hannu ; Blomberg, Martti ; Rissanen, Anna ; Puurunen, Riikka. / Novel Spectrometers Based on MEMS Fabry-Pérot Technology. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.
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abstract = "The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing",
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Kattelus, H, Blomberg, M, Rissanen, A & Puurunen, R 2012, 'Novel Spectrometers Based on MEMS Fabry-Pérot Technology', BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China, 28/08/12 - 30/08/12.

Novel Spectrometers Based on MEMS Fabry-Pérot Technology. / Kattelus, Hannu; Blomberg, Martti; Rissanen, Anna; Puurunen, Riikka.

2012. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.

Research output: Contribution to conferenceOther conference contributionScientific

TY - CONF

T1 - Novel Spectrometers Based on MEMS Fabry-Pérot Technology

AU - Kattelus, Hannu

AU - Blomberg, Martti

AU - Rissanen, Anna

AU - Puurunen, Riikka

PY - 2012

Y1 - 2012

N2 - The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing

AB - The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing

KW - MEMS

KW - Fabry-Pérot

KW - spectrometers

M3 - Other conference contribution

ER -

Kattelus H, Blomberg M, Rissanen A, Puurunen R. Novel Spectrometers Based on MEMS Fabry-Pérot Technology. 2012. BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, Dalian, China.