Novel Spectrometers Based on MEMS Fabry-Pérot Technology

Hannu Kattelus; Martti Blomberg; Anna Rissanen; Riikka Puurunen

Novel Spectrometers Based on MEMS Fabry-Pérot Technology

Hannu Kattelus
, Martti Blomberg
, Anna Rissanen
, Riikka Puurunen

Research output: Contribution to conference › Other conference contribution › Scientific

Abstract

The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing

Original language	English
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012 - Dalian, China Duration: 28 Aug 2012 → 30 Aug 2012

Conference

Conference	BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012
Abbreviated title	WCEIT2012
Country/Territory	China
City	Dalian
Period	28/08/12 → 30/08/12

Keywords

MEMS
Fabry-Pérot
spectrometers

Cite this

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title = "Novel Spectrometers Based on MEMS Fabry-P{\'e}rot Technology",

abstract = "The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing",

keywords = "MEMS, Fabry-P{\'e}rot, spectrometers",

author = "Hannu Kattelus and Martti Blomberg and Anna Rissanen and Riikka Puurunen",

year = "2012",

language = "English",

note = "BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012, WCEIT2012 ; Conference date: 28-08-2012 Through 30-08-2012",

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TY - CONF

T1 - Novel Spectrometers Based on MEMS Fabry-Pérot Technology

AU - Kattelus, Hannu

AU - Blomberg, Martti

AU - Rissanen, Anna

AU - Puurunen, Riikka

PY - 2012

Y1 - 2012

N2 - The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing

AB - The 2011 edition of International Technology Roadmap for Semiconductors (ITRS) includes for the first time microelectromechanical systems (MEMS). The roadmap is shown in detail for accelerometers, gyroscopes, microphones, and RF MEMS. Also optical filters, picoprojectors, electronic nose, microspeakers, and ultrasonic devices are depicted as emerging MEMS for mobile applications. We describe electrically tunable optical filters fabricated at low temperature, compatible with integrated circuit (IC) or optical silicon detector processing

KW - MEMS

KW - Fabry-Pérot

KW - spectrometers

M3 - Other conference contribution

T2 - BIT's 1st Annual World Congress of Emerging InfoTech-2012, WCEIT2012

Y2 - 28 August 2012 through 30 August 2012

ER -

Novel Spectrometers Based on MEMS Fabry-Pérot Technology

Abstract

Conference

Keywords

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Cite this