Nucleation and conformality of iridium and iridium oxide thin films grown by atomic layer deposition

Miika Mattinen, Jani Hämäläinen, Feng Gao, Pasi Jalkanen, Kenichiro Mizohata, Jyrki Räisänen, Riikka Puurunen, Mikko Ritala, Markku Leskelä

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