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Nucleation and conformality of iridium and iridium oxide thin films grown by atomic layer deposition
Miika Mattinen, Jani Hämäläinen, Feng Gao, Pasi Jalkanen, Kenichiro Mizohata, Jyrki Räisänen, Riikka Puurunen, Mikko Ritala, Markku Leskelä
Research output: Contribution to journal › Article › Scientific › peer-review
23
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(Scopus)