Null Detector and AC Voltage Reference Based on MEMS

Antti Manninen; Panu Helistö; Hannu Sipola; Leif Roschier; Ilkka Iisakka; Pekka Immonen

doi:10.1109/CPEM.2014.6898440

Null Detector and AC Voltage Reference Based on MEMS

Antti Manninen, Panu Helistö, Hannu Sipola, Leif Roschier, Ilkka Iisakka, Pekka Immonen

Aivon Oy

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.

Original language	English
Title of host publication	29th Conference on Precision Electromagnetic Measurements (CPEM 2014)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	424-425
ISBN (Electronic)	978-1-4799-2479-0
ISBN (Print)	978-1-4799-5205-2
DOIs	https://doi.org/10.1109/CPEM.2014.6898440
Publication status	Published - 2014
MoE publication type	A4 Article in a conference publication
Event	29th Conference on Precision Electromagnetic Measurements, CPEM 2014 - Rio de Janeiro, Brazil Duration: 24 Aug 2014 → 29 Aug 2014

Publication series

Series	CPEM Digest (Conference on Precision Electromagnetic Measurements)
Volume	29
ISSN	0589-1485

Conference

Conference	29th Conference on Precision Electromagnetic Measurements, CPEM 2014
Abbreviated title	CPEM 2014
Country/Territory	Brazil
City	Rio de Janeiro
Period	24/08/14 → 29/08/14

Keywords

microelectromechanical systems (MEMS)
null detector
voltage measurement
voltage reference

Access to Document

10.1109/CPEM.2014.6898440

Cite this

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title = "Null Detector and AC Voltage Reference Based on MEMS",

abstract = "This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.",

keywords = "microelectromechanical systems (MEMS), null detector, voltage measurement, voltage reference",

author = "Antti Manninen and Panu Helist{\"o} and Hannu Sipola and Leif Roschier and Ilkka Iisakka and Pekka Immonen",

year = "2014",

doi = "10.1109/CPEM.2014.6898440",

language = "English",

isbn = "978-1-4799-5205-2",

series = "CPEM Digest (Conference on Precision Electromagnetic Measurements)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

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booktitle = "29th Conference on Precision Electromagnetic Measurements (CPEM 2014)",

address = "United States",

note = "29th Conference on Precision Electromagnetic Measurements, CPEM 2014, CPEM 2014 ; Conference date: 24-08-2014 Through 29-08-2014",

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Manninen, A , Helistö, P , Sipola, H, Roschier, L, Iisakka, I & Immonen, P 2014, Null Detector and AC Voltage Reference Based on MEMS. in 29th Conference on Precision Electromagnetic Measurements (CPEM 2014). IEEE Institute of Electrical and Electronic Engineers, CPEM Digest (Conference on Precision Electromagnetic Measurements), vol. 29, pp. 424-425, 29th Conference on Precision Electromagnetic Measurements, CPEM 2014, Rio de Janeiro, Brazil, 24/08/14. https://doi.org/10.1109/CPEM.2014.6898440

Null Detector and AC Voltage Reference Based on MEMS. / Manninen, Antti ; Helistö, Panu ; Sipola, Hannu et al.
29th Conference on Precision Electromagnetic Measurements (CPEM 2014). IEEE Institute of Electrical and Electronic Engineers, 2014. p. 424-425 (CPEM Digest (Conference on Precision Electromagnetic Measurements), Vol. 29).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Null Detector and AC Voltage Reference Based on MEMS

AU - Manninen, Antti

AU - Helistö, Panu

AU - Sipola, Hannu

AU - Roschier, Leif

AU - Iisakka, Ilkka

AU - Immonen, Pekka

PY - 2014

Y1 - 2014

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AB - This paper describes our work with two applications of microelectromechanical systems (MEMS): a sensitive voltmeter that can be used e.g. as a null detector, and a stand-alone AC voltage reference. Both applications are based on the pull-in effect in a moving-plate capacitor.

KW - microelectromechanical systems (MEMS)

KW - null detector

KW - voltage measurement

KW - voltage reference

U2 - 10.1109/CPEM.2014.6898440

DO - 10.1109/CPEM.2014.6898440

M3 - Conference article in proceedings

SN - 978-1-4799-5205-2

T3 - CPEM Digest (Conference on Precision Electromagnetic Measurements)

SP - 424

EP - 425

BT - 29th Conference on Precision Electromagnetic Measurements (CPEM 2014)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 29th Conference on Precision Electromagnetic Measurements, CPEM 2014

Y2 - 24 August 2014 through 29 August 2014

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Manninen A , Helistö P , Sipola H, Roschier L, Iisakka I , Immonen P. Null Detector and AC Voltage Reference Based on MEMS. In 29th Conference on Precision Electromagnetic Measurements (CPEM 2014). IEEE Institute of Electrical and Electronic Engineers. 2014. p. 424-425. (CPEM Digest (Conference on Precision Electromagnetic Measurements), Vol. 29). doi: 10.1109/CPEM.2014.6898440

Null Detector and AC Voltage Reference Based on MEMS

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Keywords

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