Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography

Markku Tilli, Turkka Tuomi, Olli Anttila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication11th Nordic Semiconductor Meeting
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages115-118
ISBN (Print)951-38-2066-1
Publication statusPublished - 1984
MoE publication typeA4 Article in a conference publication
Event11th Nordic Semiconductor Meeting - Espoo, Finland
Duration: 11 Jun 198413 Jun 1984

Publication series

SeriesVTT Symposium
Number45
ISSN0357-9387

Conference

Conference11th Nordic Semiconductor Meeting
CountryFinland
CityEspoo
Period11/06/8413/06/84

Cite this

Tilli, M., Tuomi, T., & Anttila, O. (1984). Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. In 11th Nordic Semiconductor Meeting (pp. 115-118). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 45
Tilli, Markku ; Tuomi, Turkka ; Anttila, Olli. / Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. 11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. pp. 115-118 (VTT Symposium; No. 45).
@inproceedings{20cc33972d77484bacef39cc75e826d6,
title = "Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography",
author = "Markku Tilli and Turkka Tuomi and Olli Anttila",
year = "1984",
language = "English",
isbn = "951-38-2066-1",
series = "VTT Symposium",
publisher = "VTT Technical Research Centre of Finland",
number = "45",
pages = "115--118",
booktitle = "11th Nordic Semiconductor Meeting",
address = "Finland",

}

Tilli, M, Tuomi, T & Anttila, O 1984, Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. in 11th Nordic Semiconductor Meeting. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 45, pp. 115-118, 11th Nordic Semiconductor Meeting, Espoo, Finland, 11/06/84.

Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. / Tilli, Markku; Tuomi, Turkka; Anttila, Olli.

11th Nordic Semiconductor Meeting. Espoo : VTT Technical Research Centre of Finland, 1984. p. 115-118 (VTT Symposium; No. 45).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography

AU - Tilli, Markku

AU - Tuomi, Turkka

AU - Anttila, Olli

PY - 1984

Y1 - 1984

M3 - Conference article in proceedings

SN - 951-38-2066-1

T3 - VTT Symposium

SP - 115

EP - 118

BT - 11th Nordic Semiconductor Meeting

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Tilli M, Tuomi T, Anttila O. Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. In 11th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland. 1984. p. 115-118. (VTT Symposium; No. 45).