Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography

Markku Tilli, Turkka Tuomi, Olli Anttila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication11th Nordic Semiconductor Meeting
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages115-118
ISBN (Print)951-38-2066-1
Publication statusPublished - 1984
MoE publication typeA4 Article in a conference publication
Event11th Nordic Semiconductor Meeting - Espoo, Finland
Duration: 11 Jun 198413 Jun 1984

Publication series

SeriesVTT Symposium
Number45
ISSN0357-9387

Conference

Conference11th Nordic Semiconductor Meeting
CountryFinland
CityEspoo
Period11/06/8413/06/84

Cite this

Tilli, M., Tuomi, T., & Anttila, O. (1984). Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. In 11th Nordic Semiconductor Meeting (pp. 115-118). VTT Technical Research Centre of Finland. VTT Symposium, No. 45