Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	11th Nordic Semiconductor Meeting
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	115-118
ISBN (Print)	951-38-2066-1
Publication status	Published - 1984
MoE publication type	A4 Article in a conference publication
Event	11th Nordic Semiconductor Meeting - Espoo, Finland Duration: 11 Jun 1984 → 13 Jun 1984

Conference	11th Nordic Semiconductor Meeting
Country/Territory	Finland
City	Espoo
Period	11/06/84 → 13/06/84

Cite this

@inproceedings{20cc33972d77484bacef39cc75e826d6,

title = "Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography",

author = "Markku Tilli and Turkka Tuomi and Olli Anttila",

year = "1984",

language = "English",

isbn = "951-38-2066-1",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "45",

pages = "115--118",

booktitle = "11th Nordic Semiconductor Meeting",

address = "Finland",

note = "11th Nordic Semiconductor Meeting ; Conference date: 11-06-1984 Through 13-06-1984",

}

Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography. / Tilli, Markku; Tuomi, Turkka; Anttila, Olli.
11th Nordic Semiconductor Meeting. Espoo: VTT Technical Research Centre of Finland, 1984. p. 115-118 (VTT Symposium; No. 45).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Observation of a defect-free zone in annealed wafers of Czochralski silicon by means of synchrotron section topography

AU - Tilli, Markku

AU - Tuomi, Turkka

AU - Anttila, Olli

PY - 1984

Y1 - 1984

M3 - Conference article in proceedings

SN - 951-38-2066-1

T3 - VTT Symposium

SP - 115

EP - 118

BT - 11th Nordic Semiconductor Meeting

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - 11th Nordic Semiconductor Meeting

Y2 - 11 June 1984 through 13 June 1984

ER -