Original language | Finnish |
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Pages (from-to) | 54-57 |
Journal | Sähkö |
Volume | 57 |
Issue number | 11 |
Publication status | Published - 1984 |
MoE publication type | D1 Article in a trade journal |
Ohut- ja paksukalvotekniikan käyttö mikroantureissa
Markku Ylilammi
Research output: Contribution to journal › Article › Professional