Ohut- ja paksukalvotekniikan käyttö mikroantureissa

Markku Ylilammi

Research output: Contribution to journal › Article › Professional

Cite this

@article{4cc41aeac06549acb0c5d1049f173763,

title = "Ohut- ja paksukalvotekniikan k{\"a}ytt{\"o} mikroantureissa",

author = "Markku Ylilammi",

year = "1984",

language = "Finnish",

volume = "57",

pages = "54--57",

journal = "S{\"a}hk{\"o}",

issn = "0036-2670",

publisher = "S{\"a}hk{\"o}insin{\"o}{\"o}riliitto SIL",

number = "11",

}