Ohut- ja paksukalvotekniikan käyttö mikroantureissa

    Research output: Contribution to journalArticleProfessional

    Original languageFinnish
    Pages (from-to)54-57
    JournalSähkö
    Volume57
    Issue number11
    Publication statusPublished - 1984
    MoE publication typeD1 Article in a trade journal

    Cite this